Atomic layer deposition to fine-tune the surface properties and diameters of fabricated nanopores

Peng Chen, Toshiyuki Mitsui, Damon B. Farmer, Jene Golovchenko, Roy G. Gordon, Daniel Branton*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

376 Citations (Scopus)

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Material Science

Chemical Engineering