C-axis oriented sol-gel derived LiNb1-xTaxO3 thin films on Si(111) substrates

S. D. Cheng; C. H. Kam; Y. Zhou; X. Q. Han; W. X. Que; Y. L. Lam; Y. C. Chan; J. T. Oh; W. S. Gan

doi:10.1016/S0040-6090(99)01102-5

C-axis oriented sol-gel derived LiNb_1-xTa_xO₃ thin films on Si(111) substrates

S. D. Cheng^*, C. H. Kam, Y. Zhou, X. Q. Han, W. X. Que, Y. L. Lam, Y. C. Chan, J. T. Oh, W. S. Gan

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

We have successfully prepared highly c-axis oriented sol-gel derived LiNb_1-xTa_xO₃ films on Si(111) substrates. The orientations of LiNb_1-xTa_xO₃ films for different values of the tantalum composition, x, are investigated. Highly c-axis oriented films were obtained in the composition range of 0<x<0.33 and the degree of the orientation was found to be relatively low when 0.5<x<1. The c-axis orientation of the films is believed to result from a weak effect caused by the 3-fold symmetry match between the film and the Si(111) substrate. C-axis oriented LiNb_1-xTa_xO₃ films are very useful in integrated optical devices, pyroelectric devices, and metal-ferroelectric-semiconductor non-volatile memory applications.

Original language	English
Pages (from-to)	77-81
Number of pages	5
Journal	Thin Solid Films
Volume	365
Issue number	1
DOIs	https://doi.org/10.1016/S0040-6090(99)01102-5
Publication status	Published - Apr 3 2000
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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title = "C-axis oriented sol-gel derived LiNb1-xTaxO3 thin films on Si(111) substrates",

abstract = "We have successfully prepared highly c-axis oriented sol-gel derived LiNb1-xTaxO3 films on Si(111) substrates. The orientations of LiNb1-xTaxO3 films for different values of the tantalum composition, x, are investigated. Highly c-axis oriented films were obtained in the composition range of 01-xTaxO3 films are very useful in integrated optical devices, pyroelectric devices, and metal-ferroelectric-semiconductor non-volatile memory applications.",

author = "Cheng, {S. D.} and Kam, {C. H.} and Y. Zhou and Han, {X. Q.} and Que, {W. X.} and Lam, {Y. L.} and Chan, {Y. C.} and Oh, {J. T.} and Gan, {W. S.}",

year = "2000",

month = apr,

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doi = "10.1016/S0040-6090(99)01102-5",

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T1 - C-axis oriented sol-gel derived LiNb1-xTaxO3 thin films on Si(111) substrates

AU - Cheng, S. D.

AU - Kam, C. H.

AU - Zhou, Y.

AU - Han, X. Q.

AU - Que, W. X.

AU - Lam, Y. L.

AU - Chan, Y. C.

AU - Oh, J. T.

AU - Gan, W. S.

PY - 2000/4/3

Y1 - 2000/4/3

N2 - We have successfully prepared highly c-axis oriented sol-gel derived LiNb1-xTaxO3 films on Si(111) substrates. The orientations of LiNb1-xTaxO3 films for different values of the tantalum composition, x, are investigated. Highly c-axis oriented films were obtained in the composition range of 01-xTaxO3 films are very useful in integrated optical devices, pyroelectric devices, and metal-ferroelectric-semiconductor non-volatile memory applications.

AB - We have successfully prepared highly c-axis oriented sol-gel derived LiNb1-xTaxO3 films on Si(111) substrates. The orientations of LiNb1-xTaxO3 films for different values of the tantalum composition, x, are investigated. Highly c-axis oriented films were obtained in the composition range of 01-xTaxO3 films are very useful in integrated optical devices, pyroelectric devices, and metal-ferroelectric-semiconductor non-volatile memory applications.

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SN - 0040-6090

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JF - Thin Solid Films

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ER -

C-axis oriented sol-gel derived LiNb_1-xTa_xO₃ thin films on Si(111) substrates

Abstract

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