C-axis-textured LiNbO3 thin films on Si (111) substrates

S. D. Cheng; X. Q. Han; C. H. Kam; Y. Zhou; Y. L. Lam; J. T. Oh; X. W. Xu; T. C. Chong

doi:10.1007/s003390100802

C-axis-textured LiNbO₃ thin films on Si (111) substrates

S. D. Cheng^*, X. Q. Han, C. H. Kam, Y. Zhou, Y. L. Lam, J. T. Oh, X. W. Xu, T. C. Chong

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

We have successfully prepared highly c-axis-textured LiNbO₃ films on hydrogen-terminated Si (111) substrate using sol-gel spin-coating and rapid thermal annealing. These highly c-axis-textured films were obtained with a preheating at 300°C for 15 min followed by a rapid thermal annealing at 500-700°C for 120s. The c-axis orientation of the LiNbO₃ film is due to a weak effect caused by the 3-fold symmetry match between the film and the Si (111) substrate. The c-axis orientation of LiNbO₃ films is very useful in integrated optics devices and metal-ferroelectric-semiconductor nonvolatile memory applications.

Original language	English
Pages (from-to)	511-514
Number of pages	4
Journal	Applied Physics A: Materials Science and Processing
Volume	73
Issue number	4
DOIs	https://doi.org/10.1007/s003390100802
Publication status	Published - Oct 2001
Externally published	Yes

ASJC Scopus Subject Areas

General Chemistry
General Materials Science

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@article{0cbb721ec0b94050bba4c796c7ced2df,

title = "C-axis-textured LiNbO3 thin films on Si (111) substrates",

abstract = "We have successfully prepared highly c-axis-textured LiNbO3 films on hydrogen-terminated Si (111) substrate using sol-gel spin-coating and rapid thermal annealing. These highly c-axis-textured films were obtained with a preheating at 300°C for 15 min followed by a rapid thermal annealing at 500-700°C for 120s. The c-axis orientation of the LiNbO3 film is due to a weak effect caused by the 3-fold symmetry match between the film and the Si (111) substrate. The c-axis orientation of LiNbO3 films is very useful in integrated optics devices and metal-ferroelectric-semiconductor nonvolatile memory applications.",

author = "Cheng, {S. D.} and Han, {X. Q.} and Kam, {C. H.} and Y. Zhou and Lam, {Y. L.} and Oh, {J. T.} and Xu, {X. W.} and Chong, {T. C.}",

year = "2001",

month = oct,

doi = "10.1007/s003390100802",

language = "English",

volume = "73",

pages = "511--514",

journal = "Applied Physics A: Materials Science and Processing",

issn = "0947-8396",

publisher = "Springer Heidelberg",

number = "4",

}

TY - JOUR

T1 - C-axis-textured LiNbO3 thin films on Si (111) substrates

AU - Cheng, S. D.

AU - Han, X. Q.

AU - Kam, C. H.

AU - Zhou, Y.

AU - Lam, Y. L.

AU - Oh, J. T.

AU - Xu, X. W.

AU - Chong, T. C.

PY - 2001/10

Y1 - 2001/10

N2 - We have successfully prepared highly c-axis-textured LiNbO3 films on hydrogen-terminated Si (111) substrate using sol-gel spin-coating and rapid thermal annealing. These highly c-axis-textured films were obtained with a preheating at 300°C for 15 min followed by a rapid thermal annealing at 500-700°C for 120s. The c-axis orientation of the LiNbO3 film is due to a weak effect caused by the 3-fold symmetry match between the film and the Si (111) substrate. The c-axis orientation of LiNbO3 films is very useful in integrated optics devices and metal-ferroelectric-semiconductor nonvolatile memory applications.

AB - We have successfully prepared highly c-axis-textured LiNbO3 films on hydrogen-terminated Si (111) substrate using sol-gel spin-coating and rapid thermal annealing. These highly c-axis-textured films were obtained with a preheating at 300°C for 15 min followed by a rapid thermal annealing at 500-700°C for 120s. The c-axis orientation of the LiNbO3 film is due to a weak effect caused by the 3-fold symmetry match between the film and the Si (111) substrate. The c-axis orientation of LiNbO3 films is very useful in integrated optics devices and metal-ferroelectric-semiconductor nonvolatile memory applications.

UR - http://www.scopus.com/inward/record.url?scp=0035476304&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035476304&partnerID=8YFLogxK

U2 - 10.1007/s003390100802

DO - 10.1007/s003390100802

M3 - Article

AN - SCOPUS:0035476304

SN - 0947-8396

VL - 73

SP - 511

EP - 514

JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

IS - 4

ER -

C-axis-textured LiNbO₃ thin films on Si (111) substrates

Abstract

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