Carbon metal composite film deposited using novel Filtered Cathodic Vacuum Arc technique

Nai Yun Xu*, Hang Tong Teo, Xin Cai Wang, An Yan Du, Chee Mang Ng, Beng Kang Tay

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Carbon Nickel composite (C/Ni) film was prepared using a novel Filtered Cathodic Vacuum Arc (FCVA) technique. And reference pure carbon (C) film was also prepared for comparison purpose. The atomic fraction of Ni was estimated using Energy Dispersive X-Ray (EDX) spectroscopy. Atomic Force Microscopy was used to study the surface condition of the as-deposited pure C and C/Ni film, and the detailed crystal structure observed using high resolution transmission microscopy (HRTEM). Excimer laser annealing was performed to pure DLC films and C/Ni films, the structure evolution upon annealing and the effect of present of Ni in C/Ni film during laser annealing was studied using visible Raman spectroscopy.

Original languageEnglish
Title of host publication2011 IEEE 61st Electronic Components and Technology Conference, ECTC 2011
Pages1234-1238
Number of pages5
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event2011 61st Electronic Components and Technology Conference, ECTC 2011 - Lake Buena Vista, FL, United States
Duration: May 31 2011Jun 3 2011

Publication series

NameProceedings - Electronic Components and Technology Conference
ISSN (Print)0569-5503

Conference

Conference2011 61st Electronic Components and Technology Conference, ECTC 2011
Country/TerritoryUnited States
CityLake Buena Vista, FL
Period5/31/116/3/11

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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