Catalytic chemical vapor deposition of vertically aligned carbon nanotubes on iron nanoislands formed from Fe+-implanted SiO2 films

Xing Zhao Ding*, L. Huang, X. T. Zeng, S. P. Lau, B. K. Tay, W. Y. Cheung, S. P. Wong

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

The catalytic chemical vapor deposition of vertically aligned carbon nanotubes (CNT) using ultrafine iron islands was investigated. The CNTs were produced on silica surface by annealing the Fe-implanted SiO2 film. The surface morphology of the annealed samples was investigated under ambient conditions by a Nanoscope III scanning atomic force microscopy in the non-contact tapping and lift modes. The area density of the iron islands was controlled by the annealing conditions. With higher density of the iron islands, perfect alignment of the CNTs were obtained due to a crowding effect.

Original languageEnglish
Pages (from-to)3030-3033
Number of pages4
JournalCarbon
Volume42
Issue number14
DOIs
Publication statusPublished - 2004
Externally publishedYes

ASJC Scopus Subject Areas

  • General Chemistry
  • General Materials Science

Keywords

  • A. Carbon nanotubes
  • B. Chemical vapor deposition, Implantation, Raman spectroscopy

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