Characteristics of mechanically milled silicon nanocrystals embedded in TEOS thin films

H. W. Lau, O. K. Tan*, B. C. Ooi, Y. Liu, T. P. Chen, D. Lu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

5 Citations (Scopus)

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Keyphrases

Material Science

Physics

Engineering

Chemical Engineering