Characterization of filtered cathodic vacuum arc system

X. Shi; B. K. Tay; D. I. Flynn; Q. Ye; Z. Sun

doi:10.1016/S0257-8972(97)00347-2

Characterization of filtered cathodic vacuum arc system

X. Shi^*, B. K. Tay, D. I. Flynn, Q. Ye, Z. Sun

^*Corresponding author for this work

Nanyang Technological University

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

Ion energy is known to be a crucial parameter in the determination of film properties deposited by filtered cathodic vacuum arc (FCVA) technique. In this paper, the effect of system parameters such as magnetic filtering current, duct bias voltage and arc current on the ion energy were investigated. The ion energy distribution at the exit of the duct was measured by a Faraday cup. Plasma floating potential and saturation current were also determined by langmuir and current probes, respectively. The experimental results were found to be in good agreement with the simulations results based on an improved drift approximation model.

Original language	English
Pages (from-to)	195-200
Number of pages	6
Journal	Surface and Coatings Technology
Volume	94-95
DOIs	https://doi.org/10.1016/S0257-8972(97)00347-2
Publication status	Published - Oct 1997
Externally published	Yes

ASJC Scopus Subject Areas

General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

Keywords

Filtered cathodic vacuum arc
Ion energy
Plasma floating potential
Saturation current

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10.1016/S0257-8972(97)00347-2

Cite this

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title = "Characterization of filtered cathodic vacuum arc system",

abstract = "Ion energy is known to be a crucial parameter in the determination of film properties deposited by filtered cathodic vacuum arc (FCVA) technique. In this paper, the effect of system parameters such as magnetic filtering current, duct bias voltage and arc current on the ion energy were investigated. The ion energy distribution at the exit of the duct was measured by a Faraday cup. Plasma floating potential and saturation current were also determined by langmuir and current probes, respectively. The experimental results were found to be in good agreement with the simulations results based on an improved drift approximation model.",

keywords = "Filtered cathodic vacuum arc, Ion energy, Plasma floating potential, Saturation current",

author = "X. Shi and Tay, \{B. K.\} and Flynn, \{D. I.\} and Q. Ye and Z. Sun",

year = "1997",

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doi = "10.1016/S0257-8972(97)00347-2",

language = "English",

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pages = "195--200",

journal = "Surface and Coatings Technology",

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T1 - Characterization of filtered cathodic vacuum arc system

AU - Shi, X.

AU - Tay, B. K.

AU - Flynn, D. I.

AU - Ye, Q.

AU - Sun, Z.

PY - 1997/10

Y1 - 1997/10

N2 - Ion energy is known to be a crucial parameter in the determination of film properties deposited by filtered cathodic vacuum arc (FCVA) technique. In this paper, the effect of system parameters such as magnetic filtering current, duct bias voltage and arc current on the ion energy were investigated. The ion energy distribution at the exit of the duct was measured by a Faraday cup. Plasma floating potential and saturation current were also determined by langmuir and current probes, respectively. The experimental results were found to be in good agreement with the simulations results based on an improved drift approximation model.

AB - Ion energy is known to be a crucial parameter in the determination of film properties deposited by filtered cathodic vacuum arc (FCVA) technique. In this paper, the effect of system parameters such as magnetic filtering current, duct bias voltage and arc current on the ion energy were investigated. The ion energy distribution at the exit of the duct was measured by a Faraday cup. Plasma floating potential and saturation current were also determined by langmuir and current probes, respectively. The experimental results were found to be in good agreement with the simulations results based on an improved drift approximation model.

KW - Filtered cathodic vacuum arc

KW - Ion energy

KW - Plasma floating potential

KW - Saturation current

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DO - 10.1016/S0257-8972(97)00347-2

M3 - Article

AN - SCOPUS:0031250779

SN - 0257-8972

VL - 94-95

SP - 195

EP - 200

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Characterization of filtered cathodic vacuum arc system

Abstract

ASJC Scopus Subject Areas

Keywords

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