Characterization of tetrahedral amorphous carbon films by raman spectrometry

B. K. Tay; X. Shi; H. S. Yang; Z. Sun

Characterization of tetrahedral amorphous carbon films by raman spectrometry

B. K. Tay^*, X. Shi, H. S. Yang, Z. Sun

^*Corresponding author for this work

Nanyang Technological University

Research output: Contribution to conference › Paper › peer-review

Abstract

Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least squares computer program. The relative Raman intensity is found to decrease with increase of sp³/sp² bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp³ fraction.

Original language	English
Pages	364-367
Number of pages	4
Publication status	Published - 1997
Externally published	Yes
Event	7th International Symposium on IC Technology, Systems and Applications ISIC 97 - Singapore, Singapore Duration: Sept 10 1997 → Sept 12 1997

Conference

Conference	7th International Symposium on IC Technology, Systems and Applications ISIC 97
Country/Territory	Singapore
City	Singapore
Period	9/10/97 → 9/12/97

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

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title = "Characterization of tetrahedral amorphous carbon films by raman spectrometry",

abstract = "Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least squares computer program. The relative Raman intensity is found to decrease with increase of sp3/sp2 bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp3 fraction.",

author = "Tay, {B. K.} and X. Shi and Yang, {H. S.} and Z. Sun",

year = "1997",

language = "English",

pages = "364--367",

note = "7th International Symposium on IC Technology, Systems and Applications ISIC 97 ; Conference date: 10-09-1997 Through 12-09-1997",

}

TY - CONF

T1 - Characterization of tetrahedral amorphous carbon films by raman spectrometry

AU - Tay, B. K.

AU - Shi, X.

AU - Yang, H. S.

AU - Sun, Z.

PY - 1997

Y1 - 1997

N2 - Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least squares computer program. The relative Raman intensity is found to decrease with increase of sp3/sp2 bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp3 fraction.

AB - Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least squares computer program. The relative Raman intensity is found to decrease with increase of sp3/sp2 bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp3 fraction.

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UR - http://www.scopus.com/inward/citedby.url?scp=1842779960&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:1842779960

SP - 364

EP - 367

T2 - 7th International Symposium on IC Technology, Systems and Applications ISIC 97

Y2 - 10 September 1997 through 12 September 1997

ER -

Characterization of tetrahedral amorphous carbon films by raman spectrometry

Abstract

Conference

ASJC Scopus Subject Areas

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