Chemical vapor deposition of large-size monolayer MoSe2 crystals on molten glass

Jianyi Chen; Xiaoxu Zhao; Sherman J.R. Tan; Hai Xu; Bo Wu; Bo Liu; Deyi Fu; Wei Fu; Dechao Geng; Yanpeng Liu; Wei Liu; Wei Tang; Linjun Li; Wu Zhou; Tze Chien Sum; Kian Ping Loh

doi:10.1021/jacs.6bl2156

Chemical vapor deposition of large-size monolayer MoSe₂ crystals on molten glass

Jianyi Chen, Xiaoxu Zhao, Sherman J.R. Tan, Hai Xu, Bo Wu, Bo Liu, Deyi Fu, Wei Fu, Dechao Geng, Yanpeng Liu, Wei Liu, Wei Tang, Linjun Li, Wu Zhou, Tze Chien Sum, Kian Ping Loh^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

288 Citations (Scopus)

Abstract

We report the fast growth of high-quality millimeter-size monolayer MoSe₂ crystals on molten glass using an ambient pressure CVD system. We found that the isotropic surface of molten glass suppresses nucleation events and greatly improves the growth of large crystalline domains. Triangular monolayer MoSe₂ crystals with sizes reaching ∼2.5 mm, and with a room-temperature carrier mobility up to ∼95 cm²/(V-s), can be synthesized in 5 min. The method can also be used to synthesize millimeter-size monolayer MoS₂ crystals. Our results demonstrate that "liquid-state" glass is a highly promising substrate for the low-cost growth of high-quality large-size 2D transition metal dichalcogenides (TMDs).

Original language	English
Pages (from-to)	1073-1076
Number of pages	4
Journal	Journal of the American Chemical Society
Volume	139
Issue number	3
DOIs	https://doi.org/10.1021/jacs.6bl2156
Publication status	Published - Jan 25 2017
Externally published	Yes

Bibliographical note

Publisher Copyright:
© 2017 American Chemical Society.

ASJC Scopus Subject Areas

Catalysis
General Chemistry
Biochemistry
Colloid and Surface Chemistry

Access to Document

10.1021/jacs.6bl2156

Cite this

@article{c77add159d364bdf9ef6bdd862c7c1ab,

title = "Chemical vapor deposition of large-size monolayer MoSe2 crystals on molten glass",

abstract = "We report the fast growth of high-quality millimeter-size monolayer MoSe2 crystals on molten glass using an ambient pressure CVD system. We found that the isotropic surface of molten glass suppresses nucleation events and greatly improves the growth of large crystalline domains. Triangular monolayer MoSe2 crystals with sizes reaching ∼2.5 mm, and with a room-temperature carrier mobility up to ∼95 cm2/(V-s), can be synthesized in 5 min. The method can also be used to synthesize millimeter-size monolayer MoS2 crystals. Our results demonstrate that {"}liquid-state{"} glass is a highly promising substrate for the low-cost growth of high-quality large-size 2D transition metal dichalcogenides (TMDs).",

author = "Jianyi Chen and Xiaoxu Zhao and Tan, {Sherman J.R.} and Hai Xu and Bo Wu and Bo Liu and Deyi Fu and Wei Fu and Dechao Geng and Yanpeng Liu and Wei Liu and Wei Tang and Linjun Li and Wu Zhou and Sum, {Tze Chien} and Loh, {Kian Ping}",

note = "Publisher Copyright: {\textcopyright} 2017 American Chemical Society.",

year = "2017",

month = jan,

day = "25",

doi = "10.1021/jacs.6bl2156",

language = "English",

volume = "139",

pages = "1073--1076",

journal = "Journal of the American Chemical Society",

issn = "0002-7863",

publisher = "American Chemical Society",

number = "3",

}

TY - JOUR

T1 - Chemical vapor deposition of large-size monolayer MoSe2 crystals on molten glass

AU - Chen, Jianyi

AU - Zhao, Xiaoxu

AU - Tan, Sherman J.R.

AU - Xu, Hai

AU - Wu, Bo

AU - Liu, Bo

AU - Fu, Deyi

AU - Fu, Wei

AU - Geng, Dechao

AU - Liu, Yanpeng

AU - Liu, Wei

AU - Tang, Wei

AU - Li, Linjun

AU - Zhou, Wu

AU - Sum, Tze Chien

AU - Loh, Kian Ping

PY - 2017/1/25

Y1 - 2017/1/25

N2 - We report the fast growth of high-quality millimeter-size monolayer MoSe2 crystals on molten glass using an ambient pressure CVD system. We found that the isotropic surface of molten glass suppresses nucleation events and greatly improves the growth of large crystalline domains. Triangular monolayer MoSe2 crystals with sizes reaching ∼2.5 mm, and with a room-temperature carrier mobility up to ∼95 cm2/(V-s), can be synthesized in 5 min. The method can also be used to synthesize millimeter-size monolayer MoS2 crystals. Our results demonstrate that "liquid-state" glass is a highly promising substrate for the low-cost growth of high-quality large-size 2D transition metal dichalcogenides (TMDs).

AB - We report the fast growth of high-quality millimeter-size monolayer MoSe2 crystals on molten glass using an ambient pressure CVD system. We found that the isotropic surface of molten glass suppresses nucleation events and greatly improves the growth of large crystalline domains. Triangular monolayer MoSe2 crystals with sizes reaching ∼2.5 mm, and with a room-temperature carrier mobility up to ∼95 cm2/(V-s), can be synthesized in 5 min. The method can also be used to synthesize millimeter-size monolayer MoS2 crystals. Our results demonstrate that "liquid-state" glass is a highly promising substrate for the low-cost growth of high-quality large-size 2D transition metal dichalcogenides (TMDs).

UR - http://www.scopus.com/inward/record.url?scp=85019150365&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85019150365&partnerID=8YFLogxK

U2 - 10.1021/jacs.6bl2156

DO - 10.1021/jacs.6bl2156

M3 - Article

C2 - 28051869

AN - SCOPUS:85019150365

SN - 0002-7863

VL - 139

SP - 1073

EP - 1076

JO - Journal of the American Chemical Society

JF - Journal of the American Chemical Society

IS - 3

ER -