Dependence of electrical and optical properties of ZnO films on substrate temperature

X. L. Xu; S. P. Lau; J. S. Chen; Z. Sun; B. K. Tay; J. W. Chai

doi:10.1016/S1369-8001(02)00029-X

Dependence of electrical and optical properties of ZnO films on substrate temperature

X. L. Xu, S. P. Lau^*, J. S. Chen, Z. Sun, B. K. Tay, J. W. Chai

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

53 Citations (Scopus)

Abstract

ZnO films were prepared by filtered cathodic vacuum arc technique with Zn target at different substrate temperatures. The crystallinity is enhanced with increasing substrate temperature and preferably oriented at (1 0 3) direction when the substrate temperature is higher than 230°C. The PL emission corresponding to the exciton transition at 3.37 eV can be observed at room temperature, which indicates that high-quality films have been obtained by this technique. The Hall mobility, which increases with substrate temperature, is dominated by grain boundary scattering.

Original language	English
Pages (from-to)	617-620
Number of pages	4
Journal	Materials Science in Semiconductor Processing
Volume	4
Issue number	6
DOIs	https://doi.org/10.1016/S1369-8001(02)00029-X
Publication status	Published - Dec 2001
Externally published	Yes

ASJC Scopus Subject Areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Keywords

Filtered cathodic vacuum arc
Photoluminescence
Zinc oxide films

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10.1016/S1369-8001(02)00029-X

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title = "Dependence of electrical and optical properties of ZnO films on substrate temperature",

abstract = "ZnO films were prepared by filtered cathodic vacuum arc technique with Zn target at different substrate temperatures. The crystallinity is enhanced with increasing substrate temperature and preferably oriented at (1 0 3) direction when the substrate temperature is higher than 230°C. The PL emission corresponding to the exciton transition at 3.37 eV can be observed at room temperature, which indicates that high-quality films have been obtained by this technique. The Hall mobility, which increases with substrate temperature, is dominated by grain boundary scattering.",

keywords = "Filtered cathodic vacuum arc, Photoluminescence, Zinc oxide films",

author = "Xu, {X. L.} and Lau, {S. P.} and Chen, {J. S.} and Z. Sun and Tay, {B. K.} and Chai, {J. W.}",

year = "2001",

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doi = "10.1016/S1369-8001(02)00029-X",

language = "English",

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T1 - Dependence of electrical and optical properties of ZnO films on substrate temperature

AU - Xu, X. L.

AU - Lau, S. P.

AU - Chen, J. S.

AU - Sun, Z.

AU - Tay, B. K.

AU - Chai, J. W.

PY - 2001/12

Y1 - 2001/12

N2 - ZnO films were prepared by filtered cathodic vacuum arc technique with Zn target at different substrate temperatures. The crystallinity is enhanced with increasing substrate temperature and preferably oriented at (1 0 3) direction when the substrate temperature is higher than 230°C. The PL emission corresponding to the exciton transition at 3.37 eV can be observed at room temperature, which indicates that high-quality films have been obtained by this technique. The Hall mobility, which increases with substrate temperature, is dominated by grain boundary scattering.

AB - ZnO films were prepared by filtered cathodic vacuum arc technique with Zn target at different substrate temperatures. The crystallinity is enhanced with increasing substrate temperature and preferably oriented at (1 0 3) direction when the substrate temperature is higher than 230°C. The PL emission corresponding to the exciton transition at 3.37 eV can be observed at room temperature, which indicates that high-quality films have been obtained by this technique. The Hall mobility, which increases with substrate temperature, is dominated by grain boundary scattering.

KW - Filtered cathodic vacuum arc

KW - Photoluminescence

KW - Zinc oxide films

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JO - Materials Science in Semiconductor Processing

JF - Materials Science in Semiconductor Processing

IS - 6

ER -

Dependence of electrical and optical properties of ZnO films on substrate temperature

Abstract

ASJC Scopus Subject Areas

Keywords

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