Deposition and gas sensing properties of tin oxide thin films by inductively coupled plasma chemical vapor deposition

Y. C. Lee*, O. K. Tan, H. Huang, M. S. Tse

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Deposition and gas sensing properties of tin oxide thin films by inductively coupled plasma chemical vapor deposition'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science