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Effect of current direction on the lifetime of different levels of Cu dual-damascene metallization
C. L. Gan*, C. V. Thompson, K. L. Pey, W. K. Choi, H. L. Tay, B. Yu, M. K. Radhakrishnan
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
72
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(Scopus)