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Effect of ion implantation on layer inversion of Ni silicided poly-Si
P. S. Lee, K. L. Pey*, D. Mangelinck, J. Ding, D. Z. Chi, T. Osipowicz, J. Y. Dai, L. Chan
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
9
Citations
(Scopus)