@inproceedings{b93dbde3b1a847e8a304bb894b0a4afb,
title = "Effects of a-C:Fe catalyst deposition method on the growth of carbon nanotubes",
abstract = "Carbon nanotubes were grown using RF magnetron sputtering or Filtered Cathodic Vacuum Arc (FCVA) deposited iron containing atmosphere carbon (a-C: Fe) films as catalyst, by Hot filament chemical vapor deposition (HFCVD). The chemical structure of the catalyst layers was studied by X-ray diffraction (XRD) and the morphology of the films was analyzed by scanning electron microscope (SEM). Randomly orientated carbon nanotubes film was found on sputtered a-C:Fe catalyst, while well-aligned carbon nanotubes were observed on FCVA deposited a-C:Fe catalyst. The diameters of the nanotubes grown on sputtered a-C:Fe follow to that of the annealed catalyst particles grain size. However, the diameters of the nanotubes from FCVA a-C:Fe were much smaller than the grain size of the catalyst particles they grown from",
keywords = "a-C:Fe, Carbon nanotubes, Catalyst",
author = "Yung, {K. P.} and Tay, {B. K.}",
year = "2006",
doi = "10.1109/NANOEL.2006.1609755",
language = "English",
isbn = "0780393589",
series = "NanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectronics - Proceedings",
pages = "388--391",
booktitle = "NanoSingapore 2006",
note = "2006 IEEE Conference on Emerging Technologies - Nanoelectronics ; Conference date: 10-01-2006 Through 13-01-2006",
}