Abstract
Reliability of AlGaN/GaN-on-Si high electron mobility transistors (HEMTs) under forward gate bias was studied. During stressing, devices were observed to degrade through an increase in the gate leakage current. The degradation was correlated with a decrease in the Schottky barrier height. Using photon emission microscopy (PEM), transmission electron microscopy (TEM) and electron energy loss spectroscopy (EELS), the physical cause of the degradation was identified as localized carbon residue at the AlGaN/Ni gate interface.
Original language | English |
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Article number | 113432 |
Journal | Microelectronics Reliability |
Volume | 100-101 |
DOIs | |
Publication status | Published - Sept 2019 |
Externally published | Yes |
Bibliographical note
Publisher Copyright:© 2019 Elsevier Ltd
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Safety, Risk, Reliability and Quality
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering