Abstract
Sol-gel derived SiO2-TiO2 hard optical films from acid catalyzed solutions of GLYMO and MTES mixed with TPOT were studied. A single-layer film with a thickness of more than 0.6 μm was prepared on solid silicon substrate by single spin coating and a heat treatment temperature of 500 °C. The effects of the titanium content and heat treatment temperature on the optical structural properties of the fims were characterized by TGA, UV-VIS, FTIR, and Raman spectroscopy. The results show that carbon exists in all films heated at the temperature of 800°C. The hardness and Young's modulus of the films as characterized by a nanoindenter show a linear dependence on the titanium content. Hardness as high as 6.60 GPa was obtained in a 0.5 M titanium content film and heat treated at 800°C. The high hardness of the film was related to the existence of carbon phase in the film.
| Original language | English |
|---|---|
| Pages (from-to) | 1809-1813 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 21 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - Nov 2003 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films