Efficient Generation of an Array of Single Silicon-Vacancy Defects in Silicon Carbide

Keyphrases

• Cost Growth 50%
• Defects in Silicon Carbide 100%
• Implantation Dose 50%
• Quantum Engineering 50%
• Quantum Networks 50%
• Quantum Sensing 50%
• Silicon Vacancy Defect 100%
• Single Emitter 50%
• Spin Coherence Time 50%

Material Science

• Color Center 33%
• Diamond 33%
• Ion Implantation 66%
• Silicon 100%
• Silicon Carbide 100%
• Surface (Surface Science) 33%
• Vacancy Defect 100%

Physics

• Quantum Sensing 33%