Abstract
Although methods of measuring the elastic properties of thin films have made great advances with the use of bulge testing of membranes, deflection of micromachined beams, and nanoindentation, most results are still being compared to either isotropic or single crystal elastic constants, neither of which are, in general, appropriate for textured polycrystalline films. This paper uses recent results of a self-consistent model (after Kroner and Kneer) which calculates the elastic anisotropy arising from crystallographic texture and which has been extended to predict the anisotropy resulting from grain shape. These results are compared to the various Voigt, Reuss, and Hill approximations that are appropriate for different crystallographic textures. The accuracies of the different models are evaluated in terms of their ability to predict the biaxial modulus and indentation compliance that are most commonly measured in thin films.
Original language | English |
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Pages (from-to) | 171-176 |
Number of pages | 6 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 403 |
Publication status | Published - 1996 |
Externally published | Yes |
Event | Proceedings of the 1995 MRS Fall Symposium - Boston, MA, USA Duration: Nov 27 1995 → Dec 1 1995 |
ASJC Scopus Subject Areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering