Electrical properties of textured carbon film formed by pulsed laser annealing

Naiyun Xu; Hang Tong Edwin Teo; Maziar Shakerzadeh; Xincai Wang; Chee Mang Ng; Beng Kang Tay

doi:10.1016/j.diamond.2012.01.016

Electrical properties of textured carbon film formed by pulsed laser annealing

Naiyun Xu, Hang Tong Edwin Teo, Maziar Shakerzadeh, Xincai Wang, Chee Mang Ng, Beng Kang Tay^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

Previous works have showed that textured carbon film can be fabricated by applying suitable ion energy and substrate temperature. In this experiment, the effect of laser annealing on amorphous carbon films was studied. Atomic force microscopy shows the effect of laser irradiation on surface morphology of carbon film, and visible Raman spectroscopy shows that the G peak position shifted from 1540 cm ^{- 1} to 1600 cm ^{- 1}, and the increase in I(D)/I(G) intensity ratio indicates the formation of more graphitic film at higher laser energy. High resolution transmission electron microscopy (HRTEM) shows the vertical alignment formation at suitable laser energy. Electrical measurement shows that the vertical aligned carbon films exhibit low resistance, ohmic current-voltage characteristics, which suggests that vertical aligned films formed by laser irradiation may be promising material for future nano-device interconnects.

Original language	English
Pages (from-to)	135-139
Number of pages	5
Journal	Diamond and Related Materials
Volume	23
DOIs	https://doi.org/10.1016/j.diamond.2012.01.016
Publication status	Published - Mar 2012
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
General Chemistry
Mechanical Engineering
Materials Chemistry
Electrical and Electronic Engineering

Keywords

Amorphous carbon
Electrical conductivity
Graphite
Laser annealing

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10.1016/j.diamond.2012.01.016

Cite this

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title = "Electrical properties of textured carbon film formed by pulsed laser annealing",

abstract = "Previous works have showed that textured carbon film can be fabricated by applying suitable ion energy and substrate temperature. In this experiment, the effect of laser annealing on amorphous carbon films was studied. Atomic force microscopy shows the effect of laser irradiation on surface morphology of carbon film, and visible Raman spectroscopy shows that the G peak position shifted from 1540 cm - 1 to 1600 cm - 1, and the increase in I(D)/I(G) intensity ratio indicates the formation of more graphitic film at higher laser energy. High resolution transmission electron microscopy (HRTEM) shows the vertical alignment formation at suitable laser energy. Electrical measurement shows that the vertical aligned carbon films exhibit low resistance, ohmic current-voltage characteristics, which suggests that vertical aligned films formed by laser irradiation may be promising material for future nano-device interconnects.",

keywords = "Amorphous carbon, Electrical conductivity, Graphite, Laser annealing",

author = "Naiyun Xu and Teo, {Hang Tong Edwin} and Maziar Shakerzadeh and Xincai Wang and Ng, {Chee Mang} and Tay, {Beng Kang}",

year = "2012",

month = mar,

doi = "10.1016/j.diamond.2012.01.016",

language = "English",

volume = "23",

pages = "135--139",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier BV",

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TY - JOUR

T1 - Electrical properties of textured carbon film formed by pulsed laser annealing

AU - Xu, Naiyun

AU - Teo, Hang Tong Edwin

AU - Shakerzadeh, Maziar

AU - Wang, Xincai

AU - Ng, Chee Mang

AU - Tay, Beng Kang

PY - 2012/3

Y1 - 2012/3

N2 - Previous works have showed that textured carbon film can be fabricated by applying suitable ion energy and substrate temperature. In this experiment, the effect of laser annealing on amorphous carbon films was studied. Atomic force microscopy shows the effect of laser irradiation on surface morphology of carbon film, and visible Raman spectroscopy shows that the G peak position shifted from 1540 cm - 1 to 1600 cm - 1, and the increase in I(D)/I(G) intensity ratio indicates the formation of more graphitic film at higher laser energy. High resolution transmission electron microscopy (HRTEM) shows the vertical alignment formation at suitable laser energy. Electrical measurement shows that the vertical aligned carbon films exhibit low resistance, ohmic current-voltage characteristics, which suggests that vertical aligned films formed by laser irradiation may be promising material for future nano-device interconnects.

AB - Previous works have showed that textured carbon film can be fabricated by applying suitable ion energy and substrate temperature. In this experiment, the effect of laser annealing on amorphous carbon films was studied. Atomic force microscopy shows the effect of laser irradiation on surface morphology of carbon film, and visible Raman spectroscopy shows that the G peak position shifted from 1540 cm - 1 to 1600 cm - 1, and the increase in I(D)/I(G) intensity ratio indicates the formation of more graphitic film at higher laser energy. High resolution transmission electron microscopy (HRTEM) shows the vertical alignment formation at suitable laser energy. Electrical measurement shows that the vertical aligned carbon films exhibit low resistance, ohmic current-voltage characteristics, which suggests that vertical aligned films formed by laser irradiation may be promising material for future nano-device interconnects.

KW - Amorphous carbon

KW - Electrical conductivity

KW - Graphite

KW - Laser annealing

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SP - 135

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JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -

Electrical properties of textured carbon film formed by pulsed laser annealing

Abstract

ASJC Scopus Subject Areas

Keywords

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