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Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack
P. S. Lee*, D. Mangelinck, K. L. Pey, J. Ding, D. Z. Chi, T. Osipowicz, J. Y. Dai, A. See
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
23
Citations
(Scopus)