@article{de2befc4247047d4a64657c51beca3b9,
title = "Erratum: Influence of deposition temperature on the structure and internal stress of TiN films deposited by filtered cathodic vacuum arc (Journal of Vacuum Science and Technolgy A (2002) 20 (1270))",
author = "Cheng, {Y. H.} and Tay, {B. K.} and Lau, {S. P.}",
year = "2003",
month = mar,
doi = "10.1116/1.1539081",
language = "English",
volume = "21",
pages = "518",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "2",
}