Fabrication & characterization of SrTiO 3 oxygen sensor operating at very low temperature

Y. Hu; O. K. Tan; W. Cao; W. Zhu

Fabrication & characterization of SrTiO ₃ oxygen sensor operating at very low temperature

Y. Hu^*, O. K. Tan, W. Cao, W. Zhu

^*Corresponding author for this work

Research output: Contribution to conference › Paper › peer-review

2 Citations (Scopus)

Abstract

SrTiO ₃ oxygen sensor were fabricated from synthesized SrTiO ₃ and commercial SrTiO ₃ using high-energy ball milling and the thick-film screen-printing techniques. The particle sizes, micro-structural properties and oxygen sensing properties of the synthesized nano-structured SrTiO ₃ oxygen sensor were characterized using X-ray diffraction (XRD) and gas sensing measurements. Experimental results showed that particle size of the powders were milled down to be around 20 nm. The effect of different annealing temperatures (400, 500, 600, 700 and 800°C) on the gas sensing properties of the synthesized SrTiO ₃ sensor to 20% oxygen was characterized. The commercial SrTiO ₃ (with milling 0 hours and 120 hours) devices, annealed at 400°C, were used as reference. The optimal relative resistance (R _nitrogen/R _oxygen) value of 6.35 is obtained for the synthesized SrTiO ₃ sample annealed at 400°C and operating at 40°C. This operating temperature is much lower than that of the normal low temperature metal oxide semiconducting oxygen gas sensors(300-500°C)[1-4] and SrTiO ₃ oxygen gas sensors (>700°C)[5]. The response and recovery times are 1.6 minutes and 5 minutes respectively. This is considered fast for near-room temperature operated sensor device. The detected range is 1-20 % oxygen. This is a very wide range possible for a single type of sensor material.

Original language	English
Pages	1305-1309
Number of pages	5
Publication status	Published - 2003
Externally published	Yes
Event	Second IEEE International Conference on Sensors: IEEE Sensors 2003 - Toronto, Ont., Canada Duration: Oct 22 2003 → Oct 24 2003

Conference

Conference	Second IEEE International Conference on Sensors: IEEE Sensors 2003
Country/Territory	Canada
City	Toronto, Ont.
Period	10/22/03 → 10/24/03

ASJC Scopus Subject Areas

Electrical and Electronic Engineering

Keywords

Annealing temperature
Grain size
Low temperature semiconducting oxygen gas sensors
Nano-size synthesized SrTiO material

Cite this

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title = "Fabrication & characterization of SrTiO 3 oxygen sensor operating at very low temperature",

abstract = "SrTiO 3 oxygen sensor were fabricated from synthesized SrTiO 3 and commercial SrTiO 3 using high-energy ball milling and the thick-film screen-printing techniques. The particle sizes, micro-structural properties and oxygen sensing properties of the synthesized nano-structured SrTiO 3 oxygen sensor were characterized using X-ray diffraction (XRD) and gas sensing measurements. Experimental results showed that particle size of the powders were milled down to be around 20 nm. The effect of different annealing temperatures (400, 500, 600, 700 and 800°C) on the gas sensing properties of the synthesized SrTiO 3 sensor to 20% oxygen was characterized. The commercial SrTiO 3 (with milling 0 hours and 120 hours) devices, annealed at 400°C, were used as reference. The optimal relative resistance (R nitrogen/R oxygen) value of 6.35 is obtained for the synthesized SrTiO 3 sample annealed at 400°C and operating at 40°C. This operating temperature is much lower than that of the normal low temperature metal oxide semiconducting oxygen gas sensors(300-500°C)[1-4] and SrTiO 3 oxygen gas sensors (>700°C)[5]. The response and recovery times are 1.6 minutes and 5 minutes respectively. This is considered fast for near-room temperature operated sensor device. The detected range is 1-20 % oxygen. This is a very wide range possible for a single type of sensor material.",

keywords = "Annealing temperature, Grain size, Low temperature semiconducting oxygen gas sensors, Nano-size synthesized SrTiO material",

author = "Y. Hu and Tan, {O. K.} and W. Cao and W. Zhu",

year = "2003",

language = "English",

pages = "1305--1309",

note = "Second IEEE International Conference on Sensors: IEEE Sensors 2003 ; Conference date: 22-10-2003 Through 24-10-2003",

}

TY - CONF

T1 - Fabrication & characterization of SrTiO 3 oxygen sensor operating at very low temperature

AU - Hu, Y.

AU - Tan, O. K.

AU - Cao, W.

AU - Zhu, W.

PY - 2003

Y1 - 2003

N2 - SrTiO 3 oxygen sensor were fabricated from synthesized SrTiO 3 and commercial SrTiO 3 using high-energy ball milling and the thick-film screen-printing techniques. The particle sizes, micro-structural properties and oxygen sensing properties of the synthesized nano-structured SrTiO 3 oxygen sensor were characterized using X-ray diffraction (XRD) and gas sensing measurements. Experimental results showed that particle size of the powders were milled down to be around 20 nm. The effect of different annealing temperatures (400, 500, 600, 700 and 800°C) on the gas sensing properties of the synthesized SrTiO 3 sensor to 20% oxygen was characterized. The commercial SrTiO 3 (with milling 0 hours and 120 hours) devices, annealed at 400°C, were used as reference. The optimal relative resistance (R nitrogen/R oxygen) value of 6.35 is obtained for the synthesized SrTiO 3 sample annealed at 400°C and operating at 40°C. This operating temperature is much lower than that of the normal low temperature metal oxide semiconducting oxygen gas sensors(300-500°C)[1-4] and SrTiO 3 oxygen gas sensors (>700°C)[5]. The response and recovery times are 1.6 minutes and 5 minutes respectively. This is considered fast for near-room temperature operated sensor device. The detected range is 1-20 % oxygen. This is a very wide range possible for a single type of sensor material.

AB - SrTiO 3 oxygen sensor were fabricated from synthesized SrTiO 3 and commercial SrTiO 3 using high-energy ball milling and the thick-film screen-printing techniques. The particle sizes, micro-structural properties and oxygen sensing properties of the synthesized nano-structured SrTiO 3 oxygen sensor were characterized using X-ray diffraction (XRD) and gas sensing measurements. Experimental results showed that particle size of the powders were milled down to be around 20 nm. The effect of different annealing temperatures (400, 500, 600, 700 and 800°C) on the gas sensing properties of the synthesized SrTiO 3 sensor to 20% oxygen was characterized. The commercial SrTiO 3 (with milling 0 hours and 120 hours) devices, annealed at 400°C, were used as reference. The optimal relative resistance (R nitrogen/R oxygen) value of 6.35 is obtained for the synthesized SrTiO 3 sample annealed at 400°C and operating at 40°C. This operating temperature is much lower than that of the normal low temperature metal oxide semiconducting oxygen gas sensors(300-500°C)[1-4] and SrTiO 3 oxygen gas sensors (>700°C)[5]. The response and recovery times are 1.6 minutes and 5 minutes respectively. This is considered fast for near-room temperature operated sensor device. The detected range is 1-20 % oxygen. This is a very wide range possible for a single type of sensor material.

KW - Annealing temperature

KW - Grain size

KW - Low temperature semiconducting oxygen gas sensors

KW - Nano-size synthesized SrTiO material

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