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Fabrication at wafer level of micromachined gas sensors based on Sno 2 nanorods deposited by PECVD and gas sensing characteristics
A. Forleo*, L. Francioso, S. Capone, F. Casino, P. Siciliano, H. Huang, O. K. Tan
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution