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Fabrication at wafer level of miniaturized gas sensors based on SnO 2 nanorods deposited by PECVD and gas sensing characteristics
A. Forleo*, L. Francioso, S. Capone, F. Casino, P. Siciliano, O. K. Tan, H. Hui
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
44
Citations
(Scopus)