Fabrication of aligned carbon nanotubes on Cu catalyst by dc plasma-enhanced catalytic decomposition

Zhejuan Zhang; Maziar Shakerzadeh; Beng Kang Tay; Xiaocheng Li; Chongwei Tan; Li Feng Lin; Pingsheng Guo; Tao Feng; Zhuo Sun

doi:10.1016/j.apsusc.2009.02.025

Fabrication of aligned carbon nanotubes on Cu catalyst by dc plasma-enhanced catalytic decomposition

Zhejuan Zhang, Maziar Shakerzadeh, Beng Kang Tay, Xiaocheng Li, Chongwei Tan, Li Feng Lin, Pingsheng Guo, Tao Feng, Zhuo Sun^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Aligned multi-walled carbon nanotubes (ACNTs) are deposited using copper (Cu) catalyst on Chromium (Cr)-coated substrate by plasma-enhanced chemical vapor deposition at temperature of 700 °C. Acetylene gas has been used as the carbon source while ammonia is used for diluting and etching. The thicknesses of Cu films on Cr-coated Si (100) substrates are controlled by deposition time of magnetron sputtering. The growth behaviors and quality of ACNTs are investigated by scanning electron microscopy (SEM) and transmission electron microscopy. The different performance of ACNTs on various Cu films is explained by referring to the graphitic order as detected by Raman spectroscopy. The results indicate that the ACNTs are formed in tip-growth model where Cu is used as a novel catalyst, and the thickness of Cu films is responsible to the diameter and quality of synthesized CNTs.

Original language	English
Pages (from-to)	6404-6407
Number of pages	4
Journal	Applied Surface Science
Volume	255
Issue number	12
DOIs	https://doi.org/10.1016/j.apsusc.2009.02.025
Publication status	Published - Apr 1 2009
Externally published	Yes

ASJC Scopus Subject Areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

Keywords

Aligned CNTs
Cooper catalyst
DC-PECVD

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10.1016/j.apsusc.2009.02.025

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title = "Fabrication of aligned carbon nanotubes on Cu catalyst by dc plasma-enhanced catalytic decomposition",

abstract = "Aligned multi-walled carbon nanotubes (ACNTs) are deposited using copper (Cu) catalyst on Chromium (Cr)-coated substrate by plasma-enhanced chemical vapor deposition at temperature of 700 °C. Acetylene gas has been used as the carbon source while ammonia is used for diluting and etching. The thicknesses of Cu films on Cr-coated Si (100) substrates are controlled by deposition time of magnetron sputtering. The growth behaviors and quality of ACNTs are investigated by scanning electron microscopy (SEM) and transmission electron microscopy. The different performance of ACNTs on various Cu films is explained by referring to the graphitic order as detected by Raman spectroscopy. The results indicate that the ACNTs are formed in tip-growth model where Cu is used as a novel catalyst, and the thickness of Cu films is responsible to the diameter and quality of synthesized CNTs.",

keywords = "Aligned CNTs, Cooper catalyst, DC-PECVD",

author = "Zhejuan Zhang and Maziar Shakerzadeh and Tay, {Beng Kang} and Xiaocheng Li and Chongwei Tan and Lin, {Li Feng} and Pingsheng Guo and Tao Feng and Zhuo Sun",

year = "2009",

month = apr,

day = "1",

doi = "10.1016/j.apsusc.2009.02.025",

language = "English",

volume = "255",

pages = "6404--6407",

journal = "Applied Surface Science",

issn = "0169-4332",

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TY - JOUR

T1 - Fabrication of aligned carbon nanotubes on Cu catalyst by dc plasma-enhanced catalytic decomposition

AU - Zhang, Zhejuan

AU - Shakerzadeh, Maziar

AU - Tay, Beng Kang

AU - Li, Xiaocheng

AU - Tan, Chongwei

AU - Lin, Li Feng

AU - Guo, Pingsheng

AU - Feng, Tao

AU - Sun, Zhuo

PY - 2009/4/1

Y1 - 2009/4/1

N2 - Aligned multi-walled carbon nanotubes (ACNTs) are deposited using copper (Cu) catalyst on Chromium (Cr)-coated substrate by plasma-enhanced chemical vapor deposition at temperature of 700 °C. Acetylene gas has been used as the carbon source while ammonia is used for diluting and etching. The thicknesses of Cu films on Cr-coated Si (100) substrates are controlled by deposition time of magnetron sputtering. The growth behaviors and quality of ACNTs are investigated by scanning electron microscopy (SEM) and transmission electron microscopy. The different performance of ACNTs on various Cu films is explained by referring to the graphitic order as detected by Raman spectroscopy. The results indicate that the ACNTs are formed in tip-growth model where Cu is used as a novel catalyst, and the thickness of Cu films is responsible to the diameter and quality of synthesized CNTs.

AB - Aligned multi-walled carbon nanotubes (ACNTs) are deposited using copper (Cu) catalyst on Chromium (Cr)-coated substrate by plasma-enhanced chemical vapor deposition at temperature of 700 °C. Acetylene gas has been used as the carbon source while ammonia is used for diluting and etching. The thicknesses of Cu films on Cr-coated Si (100) substrates are controlled by deposition time of magnetron sputtering. The growth behaviors and quality of ACNTs are investigated by scanning electron microscopy (SEM) and transmission electron microscopy. The different performance of ACNTs on various Cu films is explained by referring to the graphitic order as detected by Raman spectroscopy. The results indicate that the ACNTs are formed in tip-growth model where Cu is used as a novel catalyst, and the thickness of Cu films is responsible to the diameter and quality of synthesized CNTs.

KW - Aligned CNTs

KW - Cooper catalyst

KW - DC-PECVD

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JO - Applied Surface Science

JF - Applied Surface Science

IS - 12

ER -

Fabrication of aligned carbon nanotubes on Cu catalyst by dc plasma-enhanced catalytic decomposition

Abstract

ASJC Scopus Subject Areas

Keywords

Access to Document

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