@inproceedings{c520a4f57e134fc0b4f2a16463a4557b,
title = "Fabrication of embedded conductive layer in polymer by plasma, immersion ion implantation",
abstract = "Plasma immersion ion implantation (PIII) offers an alternative to ion beam with the advantage of high implantation rate. However, problems inherent to the application of PIII to non-conducting materials such as polymers are due to surface charging. To overcome these difficulties and to have a controllable implantation depth, we sputtered a thin layer of gold before PIII is applied to the polymer substrate. The result is a controllable implantation depth and stronger adhesion between the metal-polymer interfaces. The extent of implantation depth can be correlated to tribological properties, electrical conductivity and Raman spectroscopy. While conductive AFM confirmed the conductivity of the embedded layer, the future applications, difficulties and limitations using this technique for fabrication of conductive embedded layer in polymers are also discussed.",
keywords = "Cathodic arc and polymer, Conductive AFM, Plasma immersion ion implantation (PIII)",
author = "Ha, {Peter C.T.} and Han, {Z. J.} and Tay, {B. K.}",
year = "2007",
doi = "10.1117/12.695666",
language = "English",
isbn = "0819465216",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Smart Materials IV",
note = "SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems ; Conference date: 11-12-2006 Through 13-12-2006",
}