Abstract
In this paper, we report our success in the fabrication of optical diffractive gratings by means of direct embossing on sol-gel derived glasses. The sol-gel glass film is derived from composite organic-inorganic material with spin-coating. No baking is required during the whole processing. As a preliminary result, the grating with a period of 1.102μm and a thickness of 57.2μm has been successfully fabricated. Our experiments provide a simple and low temperature approach for fabricating optical gratings useful in integrated optics.
| Original language | English |
|---|---|
| Pages (from-to) | 58-62 |
| Number of pages | 5 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3879 |
| Publication status | Published - 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1999 Micromachine Technology for Diffractive and Holographic Optics - Santa Clara, CA, USA Duration: Sept 20 1999 → Sept 21 1999 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering