@inproceedings{421aa890235d400ea47e75b6ab80b0cf,
title = "Fabrication of patterned metallic nanowire array using anodic aluminum oxide for interconnection applications",
abstract = "This study demonstrates the fabrication of metallic nanowires through AAO that were achieved from anodized aluminum pads. Standard microelectronic fabrication techniques were employed that would enable easy integration of the nanostructures with routine silicon manufacturing. Arrays of 60 nm diameter, 5 μm-long Ni nanowires were electrodeposited selectively in 50 μm anodized Al circular pads. A Sn solder layer was deposited on top of the nanowires for good electrical contact. The nanowires micropad showed ohmic behavior and the resistance measured was a few mΩ These metallic nanowires micropads may be attractive due to their potential application as off-chip interconnections.",
keywords = "Anodic aluminum oxide, Interconnection, Metallic nanowire",
author = "H. Cai and Gan, \{C. L.\} and Ong, \{B. S.\} and Li, \{S. Z.\} and J. Ma and Chong, \{S. C.\} and G. Sharma and K. Vaidyanathan",
year = "2007",
language = "English",
isbn = "9781605601335",
series = "Materials Science and Technology Conference and Exhibition, MS and T'07 - {"}Exploring Structure, Processing, and Applications Across Multiple Materials Systems{"}",
publisher = "Materials Science and Technology",
pages = "2731--2740",
booktitle = "Materials Science and Technology Conference and Exhibition, MS and T'07 - {"}Exploring Structure, Processing, and Applications Across Multiple Materials Systems{"}",
note = "Materials Science and Technology Conference and Exhibition, MS and T'07 - {"}Exploring Structure, Processing, and Applications Across Multiple Materials Systems{"} ; Conference date: 16-09-2007 Through 20-09-2007",
}