TY - JOUR
T1 - Fabrication of sol-gel-derived optical waveguide on InP for hybridized photonics applications
AU - Liu, J.
AU - Lam, Y. L.
AU - Chan, Y. C.
AU - Zhou, Y.
AU - Que, W. X.
AU - Ooi, B. S.
PY - 1999/12
Y1 - 1999/12
N2 - In this paper, we report on the first successful fabrication, using spin-coating and low-temperature (200 °C) annealing, of organically modified sol-gel planar optical waveguides on InP substrates. Considering the fact that the sol-gel technique is simple and cheap, and III-V compound semiconductors are the essential substrate materials for manufacturing data communication devices, we believe that our demonstration of optical waveguiding in sol-gel-derived waveguides on III-V compound semiconductors is interesting. It opens the possibility of hybridizating traditional glass or optical-crystal-based integrated optics with III-V compound semiconductor-based optoelectronics.
AB - In this paper, we report on the first successful fabrication, using spin-coating and low-temperature (200 °C) annealing, of organically modified sol-gel planar optical waveguides on InP substrates. Considering the fact that the sol-gel technique is simple and cheap, and III-V compound semiconductors are the essential substrate materials for manufacturing data communication devices, we believe that our demonstration of optical waveguiding in sol-gel-derived waveguides on III-V compound semiconductors is interesting. It opens the possibility of hybridizating traditional glass or optical-crystal-based integrated optics with III-V compound semiconductor-based optoelectronics.
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U2 - 10.1007/s003390051047
DO - 10.1007/s003390051047
M3 - Article
AN - SCOPUS:0033328406
SN - 0947-8396
VL - 69
SP - 649
EP - 651
JO - Applied Physics A: Materials Science and Processing
JF - Applied Physics A: Materials Science and Processing
IS - 6
ER -