Ferroelectric nanotubes fabricated using nanowires as positive templates

M. Alexe; D. Hesse; V. Schmidt; S. Senz; H. J. Fan; M. Zacharias; U. Gösele

doi:10.1063/1.2364260

Ferroelectric nanotubes fabricated using nanowires as positive templates

M. Alexe^*, D. Hesse, V. Schmidt, S. Senz, H. J. Fan, M. Zacharias, U. Gösele

^*Corresponding author for this work

Max Planck Institute of Microstructure Physics

Research output: Contribution to journal › Article › peer-review

70 Citations (Scopus)

Abstract

The authors report on fabrication and electrical characterization of ferroelectric nanotubes and metal-ferroelectric-metal composite nanotubes using silicon and ZnO nanowires as positive templates. Nanotubes of high aspect ratio with a minimum inner diameter of about 100 nm and a length ranging from 0.5 μm to a few microns have been obtained by magnetron sputtering and/or pulsed laser deposition. Metal-ferroelectric one-dimensional structures were characterized by piezoelectric scanning probe microscopy, showing piezoelectric hysteresis loops and ferroelectric switching. The presented fabrication approach can be used to fabricate three-dimensional capacitors for ferroelectric nonvolatile memories as well as nanosize piezoelectric scanners and actuators.

Original language	English
Article number	172907
Journal	Applied Physics Letters
Volume	89
Issue number	17
DOIs	https://doi.org/10.1063/1.2364260
Publication status	Published - 2006
Externally published	Yes

ASJC Scopus Subject Areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.2364260

Cite this

@article{f5a7088bbc2c4a4aa55ea9c70f55240d,

title = "Ferroelectric nanotubes fabricated using nanowires as positive templates",

abstract = "The authors report on fabrication and electrical characterization of ferroelectric nanotubes and metal-ferroelectric-metal composite nanotubes using silicon and ZnO nanowires as positive templates. Nanotubes of high aspect ratio with a minimum inner diameter of about 100 nm and a length ranging from 0.5 μm to a few microns have been obtained by magnetron sputtering and/or pulsed laser deposition. Metal-ferroelectric one-dimensional structures were characterized by piezoelectric scanning probe microscopy, showing piezoelectric hysteresis loops and ferroelectric switching. The presented fabrication approach can be used to fabricate three-dimensional capacitors for ferroelectric nonvolatile memories as well as nanosize piezoelectric scanners and actuators.",

author = "M. Alexe and D. Hesse and V. Schmidt and S. Senz and Fan, {H. J.} and M. Zacharias and U. G{\"o}sele",

year = "2006",

doi = "10.1063/1.2364260",

language = "English",

volume = "89",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "17",

}

TY - JOUR

T1 - Ferroelectric nanotubes fabricated using nanowires as positive templates

AU - Alexe, M.

AU - Hesse, D.

AU - Schmidt, V.

AU - Senz, S.

AU - Fan, H. J.

AU - Zacharias, M.

AU - Gösele, U.

PY - 2006

Y1 - 2006

N2 - The authors report on fabrication and electrical characterization of ferroelectric nanotubes and metal-ferroelectric-metal composite nanotubes using silicon and ZnO nanowires as positive templates. Nanotubes of high aspect ratio with a minimum inner diameter of about 100 nm and a length ranging from 0.5 μm to a few microns have been obtained by magnetron sputtering and/or pulsed laser deposition. Metal-ferroelectric one-dimensional structures were characterized by piezoelectric scanning probe microscopy, showing piezoelectric hysteresis loops and ferroelectric switching. The presented fabrication approach can be used to fabricate three-dimensional capacitors for ferroelectric nonvolatile memories as well as nanosize piezoelectric scanners and actuators.

AB - The authors report on fabrication and electrical characterization of ferroelectric nanotubes and metal-ferroelectric-metal composite nanotubes using silicon and ZnO nanowires as positive templates. Nanotubes of high aspect ratio with a minimum inner diameter of about 100 nm and a length ranging from 0.5 μm to a few microns have been obtained by magnetron sputtering and/or pulsed laser deposition. Metal-ferroelectric one-dimensional structures were characterized by piezoelectric scanning probe microscopy, showing piezoelectric hysteresis loops and ferroelectric switching. The presented fabrication approach can be used to fabricate three-dimensional capacitors for ferroelectric nonvolatile memories as well as nanosize piezoelectric scanners and actuators.

UR - http://www.scopus.com/inward/record.url?scp=33750446634&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33750446634&partnerID=8YFLogxK

U2 - 10.1063/1.2364260

DO - 10.1063/1.2364260

M3 - Article

AN - SCOPUS:33750446634

SN - 0003-6951

VL - 89

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 17

M1 - 172907

ER -

Ferroelectric nanotubes fabricated using nanowires as positive templates

Abstract

ASJC Scopus Subject Areas

Access to Document

Other files and links

Fingerprint

Cite this