Abstract
Ferroelectric thin films of BaTiO3 were prepared by a sol-gel technique on ITO-glass substrates and annealed at 650°C for 30 seconds in a rapid thermal processor (RTP) with O2atmosphere. X-ray diffraction (XRD), atomic force microscopy (AFM) and transmission spectroscopy were used to study the surface morphology and the microstructure of the films, and the results showed that the films were well crystallized, crack-free, smooth, and highly transparent in the visible-near infrared spectral zone. The ferroelectric properties of the films have been studied. A butterfly C-V loop was observed and a remnant polarization of Pr=6.3 μ C/cm2 and a coercive field of Ec=8.4 kV/cm were determined from the ferroelectric hysteresis loop.
Original language | English |
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Pages (from-to) | 221-226 |
Number of pages | 6 |
Journal | Integrated Ferroelectrics |
Volume | 33 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - 2001 |
Externally published | Yes |
Event | 12th International Symposium on Integrated Ferroelectrics - Aachen, Germany Duration: Mar 12 2000 → Mar 15 2000 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Control and Systems Engineering
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry
Keywords
- BaTiO
- Ferroelectrics
- Sol-gel
- Thin film