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Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing
K. L. Pey, K. K. Ong, P. S. Lee, Y. Setiawan, X. C. Wang, A. T.S. Wee, G. C. Lim
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Citation
(Scopus)