Formation of SrTiO₃ nanocrystals in amorphous Lu ₂O₃ high-k gate dielectric for floating gate memory application

Keyphrases

• Nanocrystals 100%
• SrTiO3 100%
• Memory Application 100%
• Floating Gate Memory 100%
• High-k Gate Dielectrics 100%
• La2O3 66%
• High-resolution Transmission Electron Microscopy (HRTEM) 33%
• Electron Microscopy Studies 33%
• Memory Window 33%
• Pulsed Laser Deposition 33%
• High-k Dielectric 33%
• Well-distributed 33%
• Retention Characteristics 33%
• Area Density 33%
• Capacitance-voltage Hysteresis 33%

Material Science

• Dielectric Material 100%
• Density 50%
• Capacitance 50%
• High-Resolution Transmission Electron Microscopy 50%
• Pulsed Laser Deposition 50%