Abstract
Using phenylcarbyne polymer as a precursor, flake-like diamond crystals can be grown by conventional hot filament chemical vapor deposition system (HF-CVD) in methane and hydrogen mixture. The flake-like diamond crystals which show two dimensional (layer by layer) growth features formed in the temperature range of 500°C to 700°C. The large flattened diamond crystals several tens of micrometers in size have been observed. It is proposed that a single crystalline diamond layer formed using polymer precursor in the initial nucleation process, followed by homo-epitaxial growth resulting in the formation of single crystalline diamond thin film.
Original language | English |
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Pages (from-to) | 159-162 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 308-309 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - Oct 31 1997 |
Externally published | Yes |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry
Keywords
- Diamond crystal
- Flakes
- Layer growth
- Polymer precursor