High-performance and tailorable pressure sensor based on ultrathin conductive polymer film

Qi Shao; Zhiqiang Niu; Michael Hirtz; Lin Jiang; Yuanjun Liu; Zhaohui Wang; Xiaodong Chen

doi:10.1002/smll.201303601

High-performance and tailorable pressure sensor based on ultrathin conductive polymer film

Qi Shao, Zhiqiang Niu, Michael Hirtz, Lin Jiang, Yuanjun Liu, Zhaohui Wang, Xiaodong Chen^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

200 Citations (Scopus)

Abstract

A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa^-1 to 17 kPa^-1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated.

Original language	English
Pages (from-to)	1466-1472
Number of pages	7
Journal	Small
Volume	10
Issue number	8
DOIs	https://doi.org/10.1002/smll.201303601
Publication status	Published - Apr 24 2014
Externally published	Yes

ASJC Scopus Subject Areas

Biotechnology
Biomaterials
General Chemistry
General Materials Science

Keywords

conductive polymer
contact resistance
micropillar array
pressure sensor

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10.1002/smll.201303601

Cite this

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abstract = "A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa-1 to 17 kPa-1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated.",

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AU - Shao, Qi

AU - Niu, Zhiqiang

AU - Hirtz, Michael

AU - Jiang, Lin

AU - Liu, Yuanjun

AU - Wang, Zhaohui

AU - Chen, Xiaodong

PY - 2014/4/24

Y1 - 2014/4/24

N2 - A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa-1 to 17 kPa-1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated.

AB - A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa-1 to 17 kPa-1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated.

KW - conductive polymer

KW - contact resistance

KW - micropillar array

KW - pressure sensor

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High-performance and tailorable pressure sensor based on ultrathin conductive polymer film

Abstract

ASJC Scopus Subject Areas

Keywords

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