Highly selective H2 gas sensors based on ZnO-modified SnO 2 nanorod arrays

Hui Huang; C. L. Chow; Y. C. Lee; C. K. Lim; O. K. Tan

doi:10.1109/ICSENS.2009.5398221

Highly selective H₂ gas sensors based on ZnO-modified SnO ₂ nanorod arrays

Hui Huang^*, C. L. Chow, Y. C. Lee, C. K. Lim, O. K. Tan

^*Corresponding author for this work

Nanyang Technological University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this work, uniform SnO₂ nanorod arrays have been grown by plasma-enhanced chemical vapor deposition (PECVD). The SnO₂ nanorods are about 5 nm at the tip, 20 nm in the bottom and 300 nm in length. The surface of the nanorods was modified by ZnO nanoclusters deposited by sputtering and by spin coating. The effects of ZnO surface modification on sensing properties of SnO₂ nanorod arrays were investigated. The SnO₂ nanorod array sensor modified with ZnO deposited by spin coating showed normal donor-like sensing response to CO gas, while it showed inverse acceptor-like sensing response up to 18.8 at 350°C to 100 ppm H₂ gas. Thus, highly selective sensors to H₂ gas were exhibited.

Original language	English
Title of host publication	IEEE Sensors 2009 Conference - SENSORS 2009
Pages	124-126
Number of pages	3
DOIs	https://doi.org/10.1109/ICSENS.2009.5398221
Publication status	Published - 2009
Externally published	Yes
Event	IEEE Sensors 2009 Conference - SENSORS 2009 - Christchurch, New Zealand Duration: Oct 25 2009 → Oct 28 2009

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	IEEE Sensors 2009 Conference - SENSORS 2009
Country/Territory	New Zealand
City	Christchurch
Period	10/25/09 → 10/28/09

ASJC Scopus Subject Areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2009.5398221

Cite this

@inproceedings{70563b81a91e4c539f5e9c920733e5e3,

title = "Highly selective H2 gas sensors based on ZnO-modified SnO 2 nanorod arrays",

abstract = "In this work, uniform SnO2 nanorod arrays have been grown by plasma-enhanced chemical vapor deposition (PECVD). The SnO2 nanorods are about 5 nm at the tip, 20 nm in the bottom and 300 nm in length. The surface of the nanorods was modified by ZnO nanoclusters deposited by sputtering and by spin coating. The effects of ZnO surface modification on sensing properties of SnO2 nanorod arrays were investigated. The SnO2 nanorod array sensor modified with ZnO deposited by spin coating showed normal donor-like sensing response to CO gas, while it showed inverse acceptor-like sensing response up to 18.8 at 350°C to 100 ppm H2 gas. Thus, highly selective sensors to H2 gas were exhibited.",

author = "Hui Huang and Chow, {C. L.} and Lee, {Y. C.} and Lim, {C. K.} and Tan, {O. K.}",

year = "2009",

doi = "10.1109/ICSENS.2009.5398221",

language = "English",

isbn = "9781424445486",

series = "Proceedings of IEEE Sensors",

pages = "124--126",

booktitle = "IEEE Sensors 2009 Conference - SENSORS 2009",

note = "IEEE Sensors 2009 Conference - SENSORS 2009 ; Conference date: 25-10-2009 Through 28-10-2009",

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T1 - Highly selective H2 gas sensors based on ZnO-modified SnO 2 nanorod arrays

AU - Huang, Hui

AU - Chow, C. L.

AU - Lee, Y. C.

AU - Lim, C. K.

AU - Tan, O. K.

PY - 2009

Y1 - 2009

N2 - In this work, uniform SnO2 nanorod arrays have been grown by plasma-enhanced chemical vapor deposition (PECVD). The SnO2 nanorods are about 5 nm at the tip, 20 nm in the bottom and 300 nm in length. The surface of the nanorods was modified by ZnO nanoclusters deposited by sputtering and by spin coating. The effects of ZnO surface modification on sensing properties of SnO2 nanorod arrays were investigated. The SnO2 nanorod array sensor modified with ZnO deposited by spin coating showed normal donor-like sensing response to CO gas, while it showed inverse acceptor-like sensing response up to 18.8 at 350°C to 100 ppm H2 gas. Thus, highly selective sensors to H2 gas were exhibited.

AB - In this work, uniform SnO2 nanorod arrays have been grown by plasma-enhanced chemical vapor deposition (PECVD). The SnO2 nanorods are about 5 nm at the tip, 20 nm in the bottom and 300 nm in length. The surface of the nanorods was modified by ZnO nanoclusters deposited by sputtering and by spin coating. The effects of ZnO surface modification on sensing properties of SnO2 nanorod arrays were investigated. The SnO2 nanorod array sensor modified with ZnO deposited by spin coating showed normal donor-like sensing response to CO gas, while it showed inverse acceptor-like sensing response up to 18.8 at 350°C to 100 ppm H2 gas. Thus, highly selective sensors to H2 gas were exhibited.

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