Influence of substrate bias on the mechanical properties of ta-C:Co films prepared by filtered cathodic vacuum arc technique

J. X. Guo; B. K. Tay; X. W. Sun; X. Z. Ding; D. H.C. Chua

doi:10.1016/S0257-8972(03)00067-7

Influence of substrate bias on the mechanical properties of ta-C:Co films prepared by filtered cathodic vacuum arc technique

J. X. Guo^*, B. K. Tay, X. W. Sun, X. Z. Ding, D. H.C. Chua

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

Cobalt-containing tetrahedral amorphous carbon (ta-C:Co) films were deposited by an off-plane double-bend filtered cathodic vacuum arc (FCVA) technique on silicon wafers at room temperature. The mechanical properties of the ta-C:Co films were systematically studied. Such metal composite coatings exhibit reduced stress, thus enabling the deposition of relatively thick coatings whilst retaining acceptable hardness.

Original language	English
Pages (from-to)	393-396
Number of pages	4
Journal	Surface and Coatings Technology
Volume	169-170
DOIs	https://doi.org/10.1016/S0257-8972(03)00067-7
Publication status	Published - Jun 2 2003
Externally published	Yes

ASJC Scopus Subject Areas

General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

Keywords

Diamond-like carbon
Filtered cathodic vacuum arc
Tetrahedral amorphous carbon

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10.1016/S0257-8972(03)00067-7

Cite this

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abstract = "Cobalt-containing tetrahedral amorphous carbon (ta-C:Co) films were deposited by an off-plane double-bend filtered cathodic vacuum arc (FCVA) technique on silicon wafers at room temperature. The mechanical properties of the ta-C:Co films were systematically studied. Such metal composite coatings exhibit reduced stress, thus enabling the deposition of relatively thick coatings whilst retaining acceptable hardness.",

keywords = "Diamond-like carbon, Filtered cathodic vacuum arc, Tetrahedral amorphous carbon",

author = "Guo, {J. X.} and Tay, {B. K.} and Sun, {X. W.} and Ding, {X. Z.} and Chua, {D. H.C.}",

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T1 - Influence of substrate bias on the mechanical properties of ta-C:Co films prepared by filtered cathodic vacuum arc technique

AU - Guo, J. X.

AU - Tay, B. K.

AU - Sun, X. W.

AU - Ding, X. Z.

AU - Chua, D. H.C.

PY - 2003/6/2

Y1 - 2003/6/2

N2 - Cobalt-containing tetrahedral amorphous carbon (ta-C:Co) films were deposited by an off-plane double-bend filtered cathodic vacuum arc (FCVA) technique on silicon wafers at room temperature. The mechanical properties of the ta-C:Co films were systematically studied. Such metal composite coatings exhibit reduced stress, thus enabling the deposition of relatively thick coatings whilst retaining acceptable hardness.

AB - Cobalt-containing tetrahedral amorphous carbon (ta-C:Co) films were deposited by an off-plane double-bend filtered cathodic vacuum arc (FCVA) technique on silicon wafers at room temperature. The mechanical properties of the ta-C:Co films were systematically studied. Such metal composite coatings exhibit reduced stress, thus enabling the deposition of relatively thick coatings whilst retaining acceptable hardness.

KW - Diamond-like carbon

KW - Filtered cathodic vacuum arc

KW - Tetrahedral amorphous carbon

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SN - 0257-8972

VL - 169-170

SP - 393

EP - 396

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Influence of substrate bias on the mechanical properties of ta-C:Co films prepared by filtered cathodic vacuum arc technique

Abstract

ASJC Scopus Subject Areas

Keywords

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