Abstract
The influence of titanium content and heat treatment temperature on the optical and mechanical properties of TiO2/γ-glycidoxypropyltrimethoxy silane and methyltrimethoxysilane hybrid films processed by the sol-gel technique are studied for photonic applications. Waveguide film with a thickness more than 1.60 μm is prepared by a single spin-coating process and low temperature heat treatment. Thermal gravimetric analysis, UV-visible spectroscopy, Fourier transform infrared spectroscopy, and Raman spectroscopy are used to investigate the optical and structural properties of the hybrid organic-inorganic films. The results indicate that a dense, low absorption, and high transparency in the visible and near infrared range waveguide films can be obtained at a low temperature. The hardness and Young's modulus of the films are characterized by a nanoindenter and they show a dependence on the heat-treatment temperature. Hardness as high as 6.60 Gpa is obtained in 0.5 M titanium content film and heat-treated at 800°C. It is proposed that the high hardness of the film may be related to the carbon and titanium content in the film.
| Original language | English |
|---|---|
| Pages (from-to) | 908-914 |
| Number of pages | 7 |
| Journal | Journal Physics D: Applied Physics |
| Volume | 36 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - Apr 7 2003 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films