Integration of Millimeter-Wave Air Filled Cavities and Filters Using Vertically Aligned Carbon Nanotubes

Ankit Kumar Verma; Rongtao Jiang; Jianping Zou; Chong Wei Tan; Amit Kumar; Beng Kang Tay; Dominique Baillargeat; Philippe Coquet; Stephane Bila

doi:10.1109/IMS40360.2025.11103942

Integration of Millimeter-Wave Air Filled Cavities and Filters Using Vertically Aligned Carbon Nanotubes

Ankit Kumar Verma, Rongtao Jiang, Jianping Zou, Chong Wei Tan, Amit Kumar^*, Beng Kang Tay, Dominique Baillargeat^*, Philippe Coquet, Stephane Bila

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This work is a step towards the 3D integration of millimeter-wave and THz circuits and subsystems with a nano-packaging technology using vertically aligned carbon nanotubes (VACNTs). In doing so, we have developed and optimized a fabrication process based on a low temperature transfer of VACNT, allowing to successfully implement millimeter-wave air filled cavities and filters towards 75 GHz. The circuits were designed and optimized using a finite element modeling tool. We particularly studied the impact of the VACNT density, which allowed to bridge the gap between device design and fabrication. The measured insertion loss values for the cavity and the filter are 3.78 dB and 4.38 dB, respectively. These experimental values obtained are in excellent agreement with the calculated ones, which paves the way for the 3D integration of more complex and higher frequency functions using this vertically aligned carbon nanotube technology.

Original language	English
Title of host publication	2025 IEEE/MTT-S International Microwave Symposium, IMS 2025
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	862-865
Number of pages	4
ISBN (Electronic)	9798331514099
DOIs	https://doi.org/10.1109/IMS40360.2025.11103942
Publication status	Published - 2025
Externally published	Yes
Event	2025 IEEE/MTT-S International Microwave Symposium, IMS 2025 - San Francisco, United States Duration: Jun 15 2025 → Jun 20 2025

Publication series

Name	IEEE MTT-S International Microwave Symposium Digest
ISSN (Print)	0149-645X

Conference

Conference	2025 IEEE/MTT-S International Microwave Symposium, IMS 2025
Country/Territory	United States
City	San Francisco
Period	6/15/25 → 6/20/25

Bibliographical note

Publisher Copyright:
© 2025 IEEE.

ASJC Scopus Subject Areas

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

Keywords

carbon nanotubes
cavity
filter
interposer
waveguide

Access to Document

10.1109/IMS40360.2025.11103942

Cite this

Verma, A. K., Jiang, R., Zou, J., Tan, C. W., Kumar, A., Tay, B. K., Baillargeat, D., Coquet, P., & Bila, S. (2025). Integration of Millimeter-Wave Air Filled Cavities and Filters Using Vertically Aligned Carbon Nanotubes. In 2025 IEEE/MTT-S International Microwave Symposium, IMS 2025 (pp. 862-865). (IEEE MTT-S International Microwave Symposium Digest). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMS40360.2025.11103942

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title = "Integration of Millimeter-Wave Air Filled Cavities and Filters Using Vertically Aligned Carbon Nanotubes",

abstract = "This work is a step towards the 3D integration of millimeter-wave and THz circuits and subsystems with a nano-packaging technology using vertically aligned carbon nanotubes (VACNTs). In doing so, we have developed and optimized a fabrication process based on a low temperature transfer of VACNT, allowing to successfully implement millimeter-wave air filled cavities and filters towards 75 GHz. The circuits were designed and optimized using a finite element modeling tool. We particularly studied the impact of the VACNT density, which allowed to bridge the gap between device design and fabrication. The measured insertion loss values for the cavity and the filter are 3.78 dB and 4.38 dB, respectively. These experimental values obtained are in excellent agreement with the calculated ones, which paves the way for the 3D integration of more complex and higher frequency functions using this vertically aligned carbon nanotube technology.",

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author = "Verma, \{Ankit Kumar\} and Rongtao Jiang and Jianping Zou and Tan, \{Chong Wei\} and Amit Kumar and Tay, \{Beng Kang\} and Dominique Baillargeat and Philippe Coquet and Stephane Bila",

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year = "2025",

doi = "10.1109/IMS40360.2025.11103942",

language = "English",

series = "IEEE MTT-S International Microwave Symposium Digest",

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Verma, AK, Jiang, R, Zou, J, Tan, CW, Kumar, A, Tay, BK, Baillargeat, D, Coquet, P & Bila, S 2025, Integration of Millimeter-Wave Air Filled Cavities and Filters Using Vertically Aligned Carbon Nanotubes. in 2025 IEEE/MTT-S International Microwave Symposium, IMS 2025. IEEE MTT-S International Microwave Symposium Digest, Institute of Electrical and Electronics Engineers Inc., pp. 862-865, 2025 IEEE/MTT-S International Microwave Symposium, IMS 2025, San Francisco, United States, 6/15/25. https://doi.org/10.1109/IMS40360.2025.11103942

Integration of Millimeter-Wave Air Filled Cavities and Filters Using Vertically Aligned Carbon Nanotubes. / Verma, Ankit Kumar; Jiang, Rongtao; Zou, Jianping et al.
2025 IEEE/MTT-S International Microwave Symposium, IMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. p. 862-865 (IEEE MTT-S International Microwave Symposium Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Verma, Ankit Kumar

AU - Jiang, Rongtao

AU - Zou, Jianping

AU - Tan, Chong Wei

AU - Kumar, Amit

AU - Tay, Beng Kang

AU - Baillargeat, Dominique

AU - Coquet, Philippe

AU - Bila, Stephane

PY - 2025

Y1 - 2025

N2 - This work is a step towards the 3D integration of millimeter-wave and THz circuits and subsystems with a nano-packaging technology using vertically aligned carbon nanotubes (VACNTs). In doing so, we have developed and optimized a fabrication process based on a low temperature transfer of VACNT, allowing to successfully implement millimeter-wave air filled cavities and filters towards 75 GHz. The circuits were designed and optimized using a finite element modeling tool. We particularly studied the impact of the VACNT density, which allowed to bridge the gap between device design and fabrication. The measured insertion loss values for the cavity and the filter are 3.78 dB and 4.38 dB, respectively. These experimental values obtained are in excellent agreement with the calculated ones, which paves the way for the 3D integration of more complex and higher frequency functions using this vertically aligned carbon nanotube technology.

AB - This work is a step towards the 3D integration of millimeter-wave and THz circuits and subsystems with a nano-packaging technology using vertically aligned carbon nanotubes (VACNTs). In doing so, we have developed and optimized a fabrication process based on a low temperature transfer of VACNT, allowing to successfully implement millimeter-wave air filled cavities and filters towards 75 GHz. The circuits were designed and optimized using a finite element modeling tool. We particularly studied the impact of the VACNT density, which allowed to bridge the gap between device design and fabrication. The measured insertion loss values for the cavity and the filter are 3.78 dB and 4.38 dB, respectively. These experimental values obtained are in excellent agreement with the calculated ones, which paves the way for the 3D integration of more complex and higher frequency functions using this vertically aligned carbon nanotube technology.

KW - carbon nanotubes

KW - cavity

KW - filter

KW - interposer

KW - waveguide

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BT - 2025 IEEE/MTT-S International Microwave Symposium, IMS 2025

PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 15 June 2025 through 20 June 2025

ER -

Verma AK, Jiang R, Zou J, Tan CW, Kumar A, Tay BK et al. Integration of Millimeter-Wave Air Filled Cavities and Filters Using Vertically Aligned Carbon Nanotubes. In 2025 IEEE/MTT-S International Microwave Symposium, IMS 2025. Institute of Electrical and Electronics Engineers Inc. 2025. p. 862-865. (IEEE MTT-S International Microwave Symposium Digest). doi: 10.1109/IMS40360.2025.11103942

Integration of Millimeter-Wave Air Filled Cavities and Filters Using Vertically Aligned Carbon Nanotubes

Abstract

Publication series

Conference

Bibliographical note

ASJC Scopus Subject Areas

Keywords

Access to Document

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Cite this