TY - GEN
T1 - Investigating the thermoelectric and structural properties of Bismuth Telluride thin films for harvesting energy from waste heat
AU - Leong, Marcus Chiang Mun
AU - Chun, Fabian Chiang Mun
AU - Wei, Jae Lee Kai
AU - Zhen, Peng Qi
AU - Ko, San Ye
AU - Ezhilvalavan, Santhiagu
AU - Hoon, Hng Hui
AU - Jan, Ma
PY - 2012
Y1 - 2012
N2 - Recently, thermoelectric thin films have been gaining attention as potential thermoelectric generators that can be used to power external devices. Such films can recover electrical energy from waste heat and are environmentally friendly. Micro fabrication of thin films is achieved by sputtering on silicon films. In this study, the sputtering of Bismuth Telluride (N-type, P-type) films was investigated. Research has verified the efficiency of Bismuth Telluride films, but little is known about how the sputtering process affects the film's quality. Thus, the focus of this study explores how sputtering parameters of discontinuous sputtering intervals, exposure to normal atmospheric conditions and in situ annealing affect the thickness, thermoelectric properties, and microstructure of films. This will bring about a better understanding of the relationship between the sputtering process and the properties of the produced film for both N and P type materials. Recommendations based on this study can contribute to the production of more efficient thin films suitable for energy harvest application.
AB - Recently, thermoelectric thin films have been gaining attention as potential thermoelectric generators that can be used to power external devices. Such films can recover electrical energy from waste heat and are environmentally friendly. Micro fabrication of thin films is achieved by sputtering on silicon films. In this study, the sputtering of Bismuth Telluride (N-type, P-type) films was investigated. Research has verified the efficiency of Bismuth Telluride films, but little is known about how the sputtering process affects the film's quality. Thus, the focus of this study explores how sputtering parameters of discontinuous sputtering intervals, exposure to normal atmospheric conditions and in situ annealing affect the thickness, thermoelectric properties, and microstructure of films. This will bring about a better understanding of the relationship between the sputtering process and the properties of the produced film for both N and P type materials. Recommendations based on this study can contribute to the production of more efficient thin films suitable for energy harvest application.
KW - Bismuth Telluride
KW - Energy harvest
KW - Sputtering
KW - Thermoelectric
KW - Thin films
KW - Waste heat
UR - http://www.scopus.com/inward/record.url?scp=84857938078&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84857938078&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/SSP.185.77
DO - 10.4028/www.scientific.net/SSP.185.77
M3 - Conference contribution
AN - SCOPUS:84857938078
SN - 9783037853658
T3 - Solid State Phenomena
SP - 77
EP - 80
BT - Advanced Structural and Functional Materials for Protection
PB - Trans Tech Publications Ltd
T2 - International Conference on Materials for Advanced Technologies, ICMAT2011, Symposium T - Advanced Structural and Functional Materials for Protection
Y2 - 26 June 2011 through 1 July 2011
ER -