LaAlO₃ nanocrystals embedded in amorphous Lu₂O ₃ high-k gate dielectric for floating gate memory application

Keyphrases

• Nanocrystals 100%
• LaAlO3 100%
• Memory Application 100%
• Floating Gate Memory 100%
• High-k Gate Dielectrics 100%
• Superior Performance 33%
• Data Retention 33%
• Pulsed Laser Deposition 33%
• High-k Dielectric 33%
• Large Memory Window 33%
• Memory Structure 33%
• Aerial 33%
• Rotating Target 33%

Material Science

• Dielectric Material 100%
• Density 50%
• Pulsed Laser Deposition 50%