Large-area synthesis of monolayer and few-layer MoSe2 films on SiO2 substrates

Xin Lu; M. Iqbal Bakti Utama; Junhao Lin; Xue Gong; Jun Zhang; Yanyuan Zhao; Sokrates T. Pantelides; Jingxian Wang; Zhili Dong; Zheng Liu; Wu Zhou; Qihua Xiong

doi:10.1021/nl5000906

Large-area synthesis of monolayer and few-layer MoSe₂ films on SiO₂ substrates

Xin Lu, M. Iqbal Bakti Utama, Junhao Lin, Xue Gong, Jun Zhang, Yanyuan Zhao, Sokrates T. Pantelides, Jingxian Wang, Zhili Dong, Zheng Liu, Wu Zhou, Qihua Xiong^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

395 Citations (Scopus)

Abstract

We present successful synthesis of large area atomically thin MoSe ₂ films by selenization of MoO₃ in a vapor transport chemical vapor deposition (CVD) system. The homogeneous thin film can reach an area of 1 × 1 cm² consisting primarily of monolayer and bilayer MoSe₂ film. Scanning transmission electron microscopy (STEM) images reveal the highly crystalline nature of the thin film and the atomic structure of grain boundaries in monolayers. Raman and photoluminescence spectroscopy confirm the high quality of as-grown MoSe₂ in optics, and electronic transport measurements highlight the potential applications of the sample in nanoelectronics.

Original language	English
Pages (from-to)	2419-2425
Number of pages	7
Journal	Nano Letters
Volume	14
Issue number	5
DOIs	https://doi.org/10.1021/nl5000906
Publication status	Published - May 14 2014
Externally published	Yes

ASJC Scopus Subject Areas

Bioengineering
General Chemistry
General Materials Science
Condensed Matter Physics
Mechanical Engineering

Keywords

chemical vapor deposition
molybdenum diselenide
monolayer
photoluminescence
Raman spectroscopy
selenization

Access to Document

10.1021/nl5000906

Cite this

@article{f3782c19c8d44a9cb2cc8c39c9cc6b61,

title = "Large-area synthesis of monolayer and few-layer MoSe2 films on SiO2 substrates",

abstract = "We present successful synthesis of large area atomically thin MoSe 2 films by selenization of MoO3 in a vapor transport chemical vapor deposition (CVD) system. The homogeneous thin film can reach an area of 1 × 1 cm2 consisting primarily of monolayer and bilayer MoSe2 film. Scanning transmission electron microscopy (STEM) images reveal the highly crystalline nature of the thin film and the atomic structure of grain boundaries in monolayers. Raman and photoluminescence spectroscopy confirm the high quality of as-grown MoSe2 in optics, and electronic transport measurements highlight the potential applications of the sample in nanoelectronics.",

keywords = "chemical vapor deposition, molybdenum diselenide, monolayer, photoluminescence, Raman spectroscopy, selenization",

author = "Xin Lu and Utama, {M. Iqbal Bakti} and Junhao Lin and Xue Gong and Jun Zhang and Yanyuan Zhao and Pantelides, {Sokrates T.} and Jingxian Wang and Zhili Dong and Zheng Liu and Wu Zhou and Qihua Xiong",

year = "2014",

month = may,

day = "14",

doi = "10.1021/nl5000906",

language = "English",

volume = "14",

pages = "2419--2425",

journal = "Nano Letters",

issn = "1530-6984",

publisher = "American Chemical Society",

number = "5",

}

TY - JOUR

T1 - Large-area synthesis of monolayer and few-layer MoSe2 films on SiO2 substrates

AU - Lu, Xin

AU - Utama, M. Iqbal Bakti

AU - Lin, Junhao

AU - Gong, Xue

AU - Zhang, Jun

AU - Zhao, Yanyuan

AU - Pantelides, Sokrates T.

AU - Wang, Jingxian

AU - Dong, Zhili

AU - Liu, Zheng

AU - Zhou, Wu

AU - Xiong, Qihua

PY - 2014/5/14

Y1 - 2014/5/14

N2 - We present successful synthesis of large area atomically thin MoSe 2 films by selenization of MoO3 in a vapor transport chemical vapor deposition (CVD) system. The homogeneous thin film can reach an area of 1 × 1 cm2 consisting primarily of monolayer and bilayer MoSe2 film. Scanning transmission electron microscopy (STEM) images reveal the highly crystalline nature of the thin film and the atomic structure of grain boundaries in monolayers. Raman and photoluminescence spectroscopy confirm the high quality of as-grown MoSe2 in optics, and electronic transport measurements highlight the potential applications of the sample in nanoelectronics.

AB - We present successful synthesis of large area atomically thin MoSe 2 films by selenization of MoO3 in a vapor transport chemical vapor deposition (CVD) system. The homogeneous thin film can reach an area of 1 × 1 cm2 consisting primarily of monolayer and bilayer MoSe2 film. Scanning transmission electron microscopy (STEM) images reveal the highly crystalline nature of the thin film and the atomic structure of grain boundaries in monolayers. Raman and photoluminescence spectroscopy confirm the high quality of as-grown MoSe2 in optics, and electronic transport measurements highlight the potential applications of the sample in nanoelectronics.

KW - chemical vapor deposition

KW - molybdenum diselenide

KW - monolayer

KW - photoluminescence

KW - Raman spectroscopy

KW - selenization

UR - http://www.scopus.com/inward/record.url?scp=84900501662&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84900501662&partnerID=8YFLogxK

U2 - 10.1021/nl5000906

DO - 10.1021/nl5000906

M3 - Article

AN - SCOPUS:84900501662

SN - 1530-6984

VL - 14

SP - 2419

EP - 2425

JO - Nano Letters

JF - Nano Letters

IS - 5

ER -