Low-k dielectric breakdown improvement with Co(W,P) cap barrier

Lyn Tan Tam; Jesica; Lip Gan Chee; Hwang Nam; Jeffrey Gambino

doi:10.1109/IPFA.2006.251008

Low-k dielectric breakdown improvement with Co(W,P) cap barrier

Lyn Tan Tam^*, Jesica, Lip Gan Chee, Hwang Nam, Jeffrey Gambino

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings of 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006
Pages	106-109
Number of pages	4
DOIs	https://doi.org/10.1109/IPFA.2006.251008
Publication status	Published - 2006
Externally published	Yes
Event	13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006 - Singapore, Singapore Duration: Jul 3 2006 → Jul 7 2006

Publication series

Name	Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Conference

Conference	13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006
Country/Territory	Singapore
City	Singapore
Period	7/3/06 → 7/7/06

ASJC Scopus Subject Areas

General Engineering

Access to Document

10.1109/IPFA.2006.251008

Cite this

Tam, L. T., Jesica, Chee, L. G., Nam, H., & Gambino, J. (2006). Low-k dielectric breakdown improvement with Co(W,P) cap barrier. In Proceedings of 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006 (pp. 106-109). Article 4017033 (Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA). https://doi.org/10.1109/IPFA.2006.251008

@inproceedings{df9f8bed975c4bf7a61037f36e597b4f,

title = "Low-k dielectric breakdown improvement with Co(W,P) cap barrier",

author = "Tam, \{Lyn Tan\} and Jesica and Chee, \{Lip Gan\} and Hwang Nam and Jeffrey Gambino",

year = "2006",

doi = "10.1109/IPFA.2006.251008",

language = "English",

isbn = "1424402069",

series = "Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA",

pages = "106--109",

booktitle = "Proceedings of 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006",

note = "13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006 ; Conference date: 03-07-2006 Through 07-07-2006",

}

Tam, LT, Jesica, , Chee, LG, Nam, H & Gambino, J 2006, Low-k dielectric breakdown improvement with Co(W,P) cap barrier. in Proceedings of 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006., 4017033, Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA, pp. 106-109, 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006, Singapore, Singapore, 7/3/06. https://doi.org/10.1109/IPFA.2006.251008

Low-k dielectric breakdown improvement with Co(W,P) cap barrier. / Tam, Lyn Tan; Jesica, ; Chee, Lip Gan et al.
Proceedings of 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006. 2006. p. 106-109 4017033 (Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Low-k dielectric breakdown improvement with Co(W,P) cap barrier

AU - Tam, Lyn Tan

AU - Jesica,

AU - Chee, Lip Gan

AU - Nam, Hwang

AU - Gambino, Jeffrey

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M3 - Conference contribution

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SN - 9781424402069

T3 - Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

SP - 106

EP - 109

BT - Proceedings of 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006

T2 - 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006

Y2 - 3 July 2006 through 7 July 2006

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Tam LT, Jesica , Chee LG, Nam H, Gambino J. Low-k dielectric breakdown improvement with Co(W,P) cap barrier. In Proceedings of 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2006. 2006. p. 106-109. 4017033. (Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA). doi: 10.1109/IPFA.2006.251008

Low-k dielectric breakdown improvement with Co(W,P) cap barrier

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Conference

ASJC Scopus Subject Areas

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