Mechanical properties of gradient pulse biased amorphous carbon film

Edwin H.T. Teo; Daniel H.C. Chua; M. L. Lee; C. L. Ee; C. K. Lee; B. K. Tay

doi:10.1016/j.tsf.2007.07.046

Mechanical properties of gradient pulse biased amorphous carbon film

Edwin H.T. Teo, Daniel H.C. Chua, M. L. Lee, C. L. Ee, C. K. Lee, B. K. Tay^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

A new method to prepare compositional amorphous carbon (a-C) film termed gradient pulse bias is presented. The a-C film prepared this way showed outstanding mechanical and excellent tribological properties. The hardness and reduced modulus of the film are calculated to be 66 GPa and 320 GPa respectively. A wear rate of 1.3 × 10^{- 8} mm³/N m and frictional coefficient of 0.1 was also recorded. The novel film is also compared with multilayered and single layer a-C film prepared using the same system.

Original language	English
Pages (from-to)	5364-5367
Number of pages	4
Journal	Thin Solid Films
Volume	516
Issue number	16
DOIs	https://doi.org/10.1016/j.tsf.2007.07.046
Publication status	Published - Jun 30 2008
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Keywords

Amorphous carbon
Hardness
Stress

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10.1016/j.tsf.2007.07.046

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title = "Mechanical properties of gradient pulse biased amorphous carbon film",

abstract = "A new method to prepare compositional amorphous carbon (a-C) film termed gradient pulse bias is presented. The a-C film prepared this way showed outstanding mechanical and excellent tribological properties. The hardness and reduced modulus of the film are calculated to be 66 GPa and 320 GPa respectively. A wear rate of 1.3 × 10- 8 mm3/N m and frictional coefficient of 0.1 was also recorded. The novel film is also compared with multilayered and single layer a-C film prepared using the same system.",

keywords = "Amorphous carbon, Hardness, Stress",

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T1 - Mechanical properties of gradient pulse biased amorphous carbon film

AU - Teo, Edwin H.T.

AU - Chua, Daniel H.C.

AU - Lee, M. L.

AU - Ee, C. L.

AU - Lee, C. K.

AU - Tay, B. K.

PY - 2008/6/30

Y1 - 2008/6/30

N2 - A new method to prepare compositional amorphous carbon (a-C) film termed gradient pulse bias is presented. The a-C film prepared this way showed outstanding mechanical and excellent tribological properties. The hardness and reduced modulus of the film are calculated to be 66 GPa and 320 GPa respectively. A wear rate of 1.3 × 10- 8 mm3/N m and frictional coefficient of 0.1 was also recorded. The novel film is also compared with multilayered and single layer a-C film prepared using the same system.

AB - A new method to prepare compositional amorphous carbon (a-C) film termed gradient pulse bias is presented. The a-C film prepared this way showed outstanding mechanical and excellent tribological properties. The hardness and reduced modulus of the film are calculated to be 66 GPa and 320 GPa respectively. A wear rate of 1.3 × 10- 8 mm3/N m and frictional coefficient of 0.1 was also recorded. The novel film is also compared with multilayered and single layer a-C film prepared using the same system.

KW - Amorphous carbon

KW - Hardness

KW - Stress

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DO - 10.1016/j.tsf.2007.07.046

M3 - Article

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SN - 0040-6090

VL - 516

SP - 5364

EP - 5367

JO - Thin Solid Films

JF - Thin Solid Films

IS - 16

ER -

Mechanical properties of gradient pulse biased amorphous carbon film

Abstract

ASJC Scopus Subject Areas

Keywords

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