Metal nanotube membranes and their lithographic applications

Woo Lee; Hong Jin Fan; Marin Alexe; Roland Scholz; Margit Zacharias; Kornelius Nielsch; Ulrich Gösele

doi:10.1109/NMDC.2006.4388876

Metal nanotube membranes and their lithographic applications

Woo Lee^*, Hong Jin Fan, Marin Alexe, Roland Scholz, Margit Zacharias, Kornelius Nielsch, Ulrich Gösele

^*Corresponding author for this work

Max Planck Institute of Microstructure Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A simple fabrication method for well-defined Au nanotube membranes has been developed. The resulting nanotube membranes were successfully used for generating wafer-scale periodic arrays of various functional nanostructures.

Original language	English
Title of host publication	2006 IEEE Nanotechnology Materials and Devices Conference, NMDC
Pages	306-307
Number of pages	2
DOIs	https://doi.org/10.1109/NMDC.2006.4388876
Publication status	Published - 2006
Externally published	Yes
Event	2006 IEEE Nanotechnology Materials and Devices Conference, NMDC - Gyeongju, Korea, Republic of Duration: Oct 22 2006 → Oct 25 2006

Publication series

Name	2006 IEEE Nanotechnology Materials and Devices Conference, NMDC
Volume	1

Conference

Conference	2006 IEEE Nanotechnology Materials and Devices Conference, NMDC
Country/Territory	Korea, Republic of
City	Gyeongju
Period	10/22/06 → 10/25/06

ASJC Scopus Subject Areas

Electrical and Electronic Engineering
General Materials Science

Keywords

Anodic aluminum oxide (AAO)
Ferroelectric nanodots
Metal nanotubes
Shadow mask
ZnO nanowires

Access to Document

10.1109/NMDC.2006.4388876

Cite this

Lee, W., Fan, H. J., Alexe, M., Scholz, R., Zacharias, M., Nielsch, K., & Gösele, U. (2006). Metal nanotube membranes and their lithographic applications. In 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC (pp. 306-307). Article 4388876 (2006 IEEE Nanotechnology Materials and Devices Conference, NMDC; Vol. 1). https://doi.org/10.1109/NMDC.2006.4388876

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keywords = "Anodic aluminum oxide (AAO), Ferroelectric nanodots, Metal nanotubes, Shadow mask, ZnO nanowires",

author = "Woo Lee and Fan, {Hong Jin} and Marin Alexe and Roland Scholz and Margit Zacharias and Kornelius Nielsch and Ulrich G{\"o}sele",

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doi = "10.1109/NMDC.2006.4388876",

language = "English",

isbn = "1424405408",

series = "2006 IEEE Nanotechnology Materials and Devices Conference, NMDC",

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Lee, W, Fan, HJ, Alexe, M, Scholz, R, Zacharias, M, Nielsch, K & Gösele, U 2006, Metal nanotube membranes and their lithographic applications. in 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC., 4388876, 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC, vol. 1, pp. 306-307, 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC, Gyeongju, Korea, Republic of, 10/22/06. https://doi.org/10.1109/NMDC.2006.4388876

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AU - Lee, Woo

AU - Fan, Hong Jin

AU - Alexe, Marin

AU - Scholz, Roland

AU - Zacharias, Margit

AU - Nielsch, Kornelius

AU - Gösele, Ulrich

PY - 2006

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KW - Anodic aluminum oxide (AAO)

KW - Ferroelectric nanodots

KW - Metal nanotubes

KW - Shadow mask

KW - ZnO nanowires

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DO - 10.1109/NMDC.2006.4388876

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SN - 9781424405404

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BT - 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC

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Metal nanotube membranes and their lithographic applications

Abstract

Publication series

Conference

ASJC Scopus Subject Areas

Keywords

Access to Document

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