Microfabrication of ZnO on a PTFE template patterned by using synchrotron radiation

Q. X. Guo; Y. Mitsuishi; T. Tanaka; M. Nishio; H. Ogawa; Y. Z. Huang

doi:10.3938/jkps.53.2796

Microfabrication of ZnO on a PTFE template patterned by using synchrotron radiation

Q. X. Guo, Y. Mitsuishi, T. Tanaka, M. Nishio, H. Ogawa, Y. Z. Huang

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Microstructures of ZnO were fabricated on polytetrafluoroethylene, which had been patterned by synchrotron radiation light irradiation, by using metal organic decomposition. Near-band-edge emission without any deep-level emissions was observed at 3.2 eV from the ZnO microstructures. The results show that the process is promising for obtaining micro- and nanostructured ZnO with a high aspect ratio and a high resolution.

Original language	English
Pages (from-to)	2796-2799
Number of pages	4
Journal	Journal of the Korean Physical Society
Volume	53
Issue number	5 PART 2
DOIs	https://doi.org/10.3938/jkps.53.2796
Publication status	Published - Nov 2008
Externally published	Yes

ASJC Scopus Subject Areas

General Physics and Astronomy

Keywords

Microfabrication
PTFE
Synchrotron radiation
Zinc oxide

Access to Document

10.3938/jkps.53.2796

Cite this

@article{3e26a10d0e9f4333a8295a1b203d47c8,

title = "Microfabrication of ZnO on a PTFE template patterned by using synchrotron radiation",

abstract = "Microstructures of ZnO were fabricated on polytetrafluoroethylene, which had been patterned by synchrotron radiation light irradiation, by using metal organic decomposition. Near-band-edge emission without any deep-level emissions was observed at 3.2 eV from the ZnO microstructures. The results show that the process is promising for obtaining micro- and nanostructured ZnO with a high aspect ratio and a high resolution.",

keywords = "Microfabrication, PTFE, Synchrotron radiation, Zinc oxide",

author = "Guo, {Q. X.} and Y. Mitsuishi and T. Tanaka and M. Nishio and H. Ogawa and Huang, {Y. Z.}",

year = "2008",

month = nov,

doi = "10.3938/jkps.53.2796",

language = "English",

volume = "53",

pages = "2796--2799",

journal = "Journal of the Korean Physical Society",

issn = "0374-4884",

publisher = "Korean Physical Society",

number = "5 PART 2",

}

TY - JOUR

T1 - Microfabrication of ZnO on a PTFE template patterned by using synchrotron radiation

AU - Guo, Q. X.

AU - Mitsuishi, Y.

AU - Tanaka, T.

AU - Nishio, M.

AU - Ogawa, H.

AU - Huang, Y. Z.

PY - 2008/11

Y1 - 2008/11

N2 - Microstructures of ZnO were fabricated on polytetrafluoroethylene, which had been patterned by synchrotron radiation light irradiation, by using metal organic decomposition. Near-band-edge emission without any deep-level emissions was observed at 3.2 eV from the ZnO microstructures. The results show that the process is promising for obtaining micro- and nanostructured ZnO with a high aspect ratio and a high resolution.

AB - Microstructures of ZnO were fabricated on polytetrafluoroethylene, which had been patterned by synchrotron radiation light irradiation, by using metal organic decomposition. Near-band-edge emission without any deep-level emissions was observed at 3.2 eV from the ZnO microstructures. The results show that the process is promising for obtaining micro- and nanostructured ZnO with a high aspect ratio and a high resolution.

KW - Microfabrication

KW - PTFE

KW - Synchrotron radiation

KW - Zinc oxide

UR - http://www.scopus.com/inward/record.url?scp=57349181396&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=57349181396&partnerID=8YFLogxK

U2 - 10.3938/jkps.53.2796

DO - 10.3938/jkps.53.2796

M3 - Article

AN - SCOPUS:57349181396

SN - 0374-4884

VL - 53

SP - 2796

EP - 2799

JO - Journal of the Korean Physical Society

JF - Journal of the Korean Physical Society

IS - 5 PART 2

ER -

Microfabrication of ZnO on a PTFE template patterned by using synchrotron radiation

Abstract

ASJC Scopus Subject Areas

Keywords

Access to Document

Other files and links

Fingerprint

Cite this