TY - GEN
T1 - Micromachined thick film piezoelectric ultrasonic transducer array
AU - Wang, Zhihong
AU - Zhu, Weiguang
AU - Miao, Jianmin
AU - Zhu, Hong
AU - Chao, Chen
AU - Tan, Ooi Kiang
PY - 2005
Y1 - 2005
N2 - This paper presents two-dimensional membrane-type ultrasonic transducer arrays based on thick piezoelectric film and micromachining. The transducer array can be used to generate ultrasound in air or water. Individual array element consists of a thick piezoelectric film and a periphery clamped rectangular membrane. The vibrating membranes, which are the radiating elements of the transducer, are excited by thick piezoelectric film. A composite coating technique based on chemical solution deposition and high-energy ball milled powders has been employed to fabricate thick PZT film on platinized silicon wafer. High yield micromachining of the integrated transducer array on silicon or SOI wafer using such thick PZT films with thickness of up to 10 μm has been successfully demonstrated. The directivities of the array have also been measured and reported.
AB - This paper presents two-dimensional membrane-type ultrasonic transducer arrays based on thick piezoelectric film and micromachining. The transducer array can be used to generate ultrasound in air or water. Individual array element consists of a thick piezoelectric film and a periphery clamped rectangular membrane. The vibrating membranes, which are the radiating elements of the transducer, are excited by thick piezoelectric film. A composite coating technique based on chemical solution deposition and high-energy ball milled powders has been employed to fabricate thick PZT film on platinized silicon wafer. High yield micromachining of the integrated transducer array on silicon or SOI wafer using such thick PZT films with thickness of up to 10 μm has been successfully demonstrated. The directivities of the array have also been measured and reported.
KW - Micromachining
KW - Piezoelectric thick film
KW - Ultrasonic transducer array
UR - http://www.scopus.com/inward/record.url?scp=27544483122&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=27544483122&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:27544483122
SN - 0780389948
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 883
EP - 886
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -