Abstract
A hybrid sol-gel process technology has been developed for the fabrication of thick films of lead zirconate titanate (PZT) thick films. In this paper, submicron-sized PZT powder was dispersed into a 2-methoxyethanol (MOE) diluted PZT sol solution uniformly to obtain a suspension/slurry for spin-coating purpose. Thick films on platinized silicon substrate with thickness of 10μm were obtained after annealing at 650°C for 30min. A higher sol solution concentration had larger single layer thickness, but a smaller one resulted in a more uniform surface. The resultant films have a composite microstructure. Dielectric and ferroelectric properties were investigated for all samples made from such process. Ferroelectric P-E hysteresis loop were obtained for most of them and the dielectric constant, remanent polarization, and coercive field for sample 3023 were 884, 20μC/cm2, and 95kV/cm, which was comparable with bulk PZT ceramic.
| Original language | English |
|---|---|
| Pages (from-to) | 1925-1927 |
| Number of pages | 3 |
| Journal | Ceramics International |
| Volume | 30 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 2004 |
| Externally published | Yes |
| Event | 3rd Asian Meeting on Electroceramics - Singapore, Singapore Duration: Dec 7 2003 → Dec 11 2003 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Materials Chemistry
Keywords
- A. Film
- D. PZT
- Sol-gel