Microstructure dependence on processing temperature in sol-gel derived thin ferroelectric films of LiNbO₃ on SiO₂/Si substrate

Keyphrases

• Microstructure 100%
• Silica 100%
• Si Substrate 100%
• Sol-gel 100%
• Ferroelectric Thin Film 100%
• Processing Temperature 100%
• Lithium Niobate 100%
• Atomic Force Microscopy 50%
• Raman Spectroscopy 50%
• Annealing 50%
• X Ray Diffraction 50%
• Grain Size 50%
• Nanocrystalline 50%
• Integrated Optics 50%
• Crystalline Structure 50%
• Annealed Films 50%
• Ultrafine 50%
• Waveguide 50%
• On-Silicon 50%
• Film Materials 50%
• Variable Angle Spectroscopic Ellipsometry 50%
• Trigonal Phase 50%

Material Science

• Film 100%
• Sol-Gel 100%
• Ferroelectric Thin Films 100%
• Silicon Dioxide 16%
• Crystal Structure 16%
• Raman Spectroscopy 16%
• X-Ray Diffraction 16%
• Silicon 16%
• Thin Films 16%
• Grain Size 16%
• Nanocrystalline 16%
• Waveguide 16%
• Atomic Force Microscopy 16%