Modification of tetrahedral amorphous carbon film by concurrent Ar ion bombardment during deposition

L. K. Cheah, X. Shi, B. K. Tay, E. Liu

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Modification of tetrahedral amorphous carbon film by concurrent Ar ion bombardment during deposition'. Together they form a unique fingerprint.

Material Science

Keyphrases